Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

93 28.2 51.3 8 ASD530FG-03-08S 15.2 46.9 41.9 45.4 40.4 23 19.8 19 R 3/8 40 35 14 21 98 32.6 54.1 10 ASD530FG-03-10S 18.5 23.1 22 101 34.4 55.9 12 ASD530FG-03-12S 20.9 21 177 32.6 64.3 10 ASD630FG-04-10S 18.5 64.8 57.3 56.7 49.2 28.6 26.5 25.9 24 R 1/2 49.6 42.1 18.6 22 179 34.4 66.1 12 ASD630FG-04-12S 20.9 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads

Dual Speed Controller with One-touch Fitting Series ASD 1

15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 23 14 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions of M5 x 0.8, R threads after installation. 15-9-16 4 Dual Speed Controller with One-touch

ASD

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-59-1A SV1000-59-2A 10 Applicable fitting size d A L D Model KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 SV1000 SX3000-77-1A SX3000-77-1A 16 4 16 32 6 SV2000-59-1A SV2000-59-2A 10 6 18 35 8 SV2000 SV2000-59-3A SV2000-59-3A 16 8 20.5 39 10 SV3000 SV4000 SV3000-59-1A SV3000-59-1A 10 10 22 43 12 SY9000-57-1A SY9000-57-1A 10 12 24 44.5 14 1/8" 16 31.5 5 5/32

0.4

4 5 6 7 8 2 x G3/4 Conduit port C10 [3(R) EXH port] (C12 in case of branch type) C10 [3(R) EXH port] C10: 10 one-touch fitting C10: 10 one-touch fitting (C12: 12 one-touch fitting) R R DIN rail clamp screw 45.5 77.5 3 X 12 3 49.5 B B B B B B B B P X P 12 30 1 1 A A A A A A A A 13.5 C10 [1(P) SUP port] C10: 10 one-touch fitting (7.5) (12) P = 16 45 25 C10 [1(P) SUP port] (C12 in case of branch

5 Port Solenoid Valve

Terminal Polarity Flat ribbon cable connector no. () SOL.A (+) 20 20 19 Station 1 SOL.B () (+) 18 18 17 SOL.A () (+) 16 16 15 Station 2 SOL.B () (+) 14 14 13 SOL.A 12 () (+) 12 11 Station 3 SOL.B 10 () (+) 10 9 SOL.A 8 7 8 () (+) Connector terminal no.

Fieldbus System

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

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BT-IS 10 10 BT-12 BT12 10 ;J;lA5EJ1A60 17 17 , . ' 0A59W .. 17 0 0 I: C" iD :IJ 0 a. ~ [,lrH5901Y690 I' D-V7P/Y7PV ; ", BSI-1 60 8S'-140 881-125 7 13 12 , D-Y7f:jWIY7OWV .' . 0Y7BAL ' .. 0Z7IJIZ80 D-Y591J1Y690 0.V7P/Y7Pi/ . 8$4125 !

Information

(mm) ASG32F-01 4 ASG42F-02 6, 8 ASG52F-03 6 ASG62F-04 Sealant: Special FKM Seat ring: Stainless steel 303 8 12 4, 6 8, 10 10, 12 460 790 920 1580 100 180 230 390 Flow rate (l/min (ANR)) Controlled (free) flow 7 12 14 24 1.5 2.7 3.5 6 Effective area (mm2) Applicable tubing materials Note) Flow rate is measured at 0.5 MPa and 20C.

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12), EXH: 12 (One-touch Fitting ø12), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12), EXH: 12 (One-touch Fitting ø12), Accessories: NS (w/o Standard Bracket, w/Silencer)

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -66, Air Consumption Flow Rate(l/min): 196, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: Silencers, Ultimate Vacuum(kPa): -66, Air Consumption Flow Rate(l/min): 196, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating

MHK2

4 9 13 75 Double acting Single acting MHK2-16D 16 6 14.6 20.6 113 MHK2-20D 20 10 16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C 20 44 10

2

Model Weight (g) Release button color 6 10 KDM6-10-X1053 611 12 KDM6-12-X1053 607 KQ2 10 10 KDM10-10-X1053 708 10, 12 Light gray 12 KDM10-12-X1053 995 KDM6 20 10 KDM20-10-X1053 1385 12 KDM20-12-X1053 1945 Plug connector KDM Applicable Tubing Specifications Fluid Air Operating pressure range Note) 0 to 1 MPa Tubing material Nylon, Soft nylon, Polyurethane Tubing O.D. 10, 12 Proof pressure