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Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Y (DC Low Wattage Type (0.5W), Power Supply Voltage: 6 (12VDC), Electrical Entry: LO (L Plug Connector w/o Connector, Light/Surge Voltage Suppressor), Manual Override: B (Locking Type), Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: Grommet w/0.3m Lead Wire, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port: ø4, Straight, Vacuum, V Port: ø4, Straight

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: Latching Negative Common, Release: NC, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: M Plug Connector w/o Connector, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: DC Low Wattage Type (0.5W, Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: DC Low Wattage Type (0.5W, Power Supply Voltage: 12VDC, Electrical Entry: L Plug Connector w/o Connector, Light/Surge Voltage Suppressor, Manual Override: Locking Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port: ø4

state (AMH) Element initial state (AMH) 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 0 0 0 1200 900 600 300 Inlet air flow rate (L/min [ANR]) 0 800 600 400 200 Inlet air flow rate

Area: (800) 258-9200-www.stevenengineering.com P1 = 0.8MPa 1 0.9 0.8 0.7 0.6 0.5 1 0.9 0.8 0.7 0.6 0.5 P1 = 0.6MPa Ex. 2 P1 = 0.5MPa P1 = 0.4MPa 0.4 0.4 P1 = 0.3MPa Ex. 1 0.3 0.3 P1 = 0.2MPa 0.2 0.2 P1 = 0.1MPa 0.1 0.1 0.001 0.04 0.03 0.02 0.01 0.004 0.003 0.002 0.1 Pressure difference P [MPa] Graph (2) Flow characteristics line Example 1) Obtain the pressure difference when water 15 [l/

state (AMH) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 100 200 300 400 0 400 800 1200 1600 0 Inlet air flow rate

P1 = 0.7 MPa P1 = 0.7 MPa 0.08 0.08 P1 = 0.5 MPa P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.1 MPa P1 = 0.5 MPa P1 = 0.1 MPa 0.06 0.06 P1 = 0.3 MPa Maintenance 0.04 0.04 F.R.L. Warning 0.02 0.02 AV 1.

IFW550 0.10 P1 = 0.6 MPa P1 = 0.5 MPa P1 = 0.4 MPa P1 = 0.3 MPa 0.08 Pressure drop (MPa) P1 = 0.2 MPa 0.06 P1 = 0.1 MPa Component Parts 0.04 No. Description Material Description Material No.

system Direct operated Pilot operated diaphragm Pilot operated disk Pilot operated Series VX21/22/23 VXD21/22/23 Single unit Single unit VXP21/22/23 VXR21/22/23 Body Single unit N.C.

When P2 + 0.1 b, choked flow P1 + 0.1 Q = 600 x C (P1 + 0.1) (1) 293 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to be described by L (liter). 1 dm3 = 1 L 38 Solenoid Valve Flow-rate Characteristics Series VX21/22/23 C : Sonic

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

= 0.3MPa P1 = 0.5MPa P1 = 0.7MPa P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.12 0.08 Pressure drop MPa Pressure drop MPa 0.10 0.06 0.08 0.06 0.04 0.04 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.02 P1 = 0.3MPa P1 = 0.5MPa P1 = 0.7MPa 0.02 200 400 600 800 0 100 200 300 400 500 0 Inlet air flow rate l/min (ANR) Inlet air flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.0353SCFM 22 Series IDG Membrane

state (AMH) Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 0.12 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.10 0.10 0.08 0.08 0.06 0.06 0.04 0.04 P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.02 0.02 100 200 300 400 0 400 800 1200 1600 0 Inlet air flow rate

When using the power factor improving DC reactor, disconnect P1 and P2, and connect the power factor improving DC reactor to P1 and P2. Refer to section 12.13. Power factor improving DC reactor P1 P2 When using driver built-in regenerative resistor, connect P( ) and D.

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

= 1.0 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.1 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.08 0.08 P1 = 0.7 MPa Pressure drop [MPa] Pressure drop [MPa] P1 = 1.0 MPa 0.06 0.06 P1 = 0.1 MPa 0.04 0.04 0.02 0.02 0 0 0 500 1500 1000 Flow rate [L/min (ANR)] 0 2000 1000 4000 3000 Flow rate [L/min (ANR)] AF40-D Rc1/2 AF40-06-D Rc3/4 0.1 0.1 P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 =

11.1 13.4 20.6 23.9 47 38.9 13.3 13.8 7.7 6.6 4.6 53.4 5/16 1/4 KQ2VD09-35P 19 13.2 17.6 23.7 23.9 50.7 42.6 14.2 15.9 16 11.2 6 49.3 3/8 KQ2VD09-36P 22 13.2 17.6 23.7 24.9 51.7 43.6 14.2 15.9 16 11.2 6 63.4 1/2 KQ2VD09-37P 28.57 13.2 17.6 23.7 30.2 57 46.6 14.2 15.9 16 11.2 6 113.5 3/8 1/4 KQ2VD11-35P 22 15.4 20.6 25.3 26.1 58 49.9 15.6 19.2 23.4 19.3 7 72.2 3/8 KQ2VD11-36P 22 15.4 20.6