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m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

CRBU

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

ZP

dia. 1 02 to 08 2 10 to 16 Lock ring 3 20 to 32 4 40, 50 Pad N6 A8 4 ZP Y Pad [q Type Y adaptor] With buffer ZP 50 K20 Y A14 U6 UGN [Pad model no.]

Rotary Actuator/Vane Type

X = E4 = E2 = DApplicable shaft type: W Applicable shaft type: W [mm] Size CRB2, CRBU2 Y L2 L4 max 10 3 to 8 5-(8-Y) to (Y-1) Y-1 15 3 to 9 6-(2-Y) to (Y-1.5) Y-1.5 20 3 to 10 7-(10-Y) to (Y-1.5) Y-1.5 30 5 to 13 8-(13-Y) to (Y-2) Y-2 40 7 to 15 9-(15-Y) to (Y-4.5) Y-4.5 [mm] Size CRB2 CRBU2 X L1 L3 max X L1 L3 max 10 5 to 14 9-(14-X) to (X-3) X-3 3 to 14 9-(14-X) to (X-1) X-1 15 8 to 18

CRB2/CRBU2/CRB1

Applicable shaft type: W (mm) Size L2 Y (mm) Size 10 X L1 3 to 8 5-(8-Y) to (Y-1) 10 15 9-(14-X) to (X-3) 5 to 14 3 to 9 6-(9-Y) to (Y-1.5) Y = L1= 15 20 8 to 18 10-(18-X) to (X-4) 3 to 10 7-(10-Y) to (Y-1.5) L2 = 20 30 10 to 20 10-(20-X) to (X-4.5) 5 to 13 8-(13-Y) to (Y-2) X = 30 40 10 to 22 12-(22-X) to (X-5) 7 to 15 9-(15-Y) to (Y-2) CRB1 Free-Mounting Type CRBU2 CRB2 Symbol: A11 Symbol

ZP

0 i u y Component Parts No.

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0 y !3 !5 @3 !0 !

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A J K B Y C D Misc.

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YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEC Y 3.

V100

) (D, Y) VS N.C.

5-Port Solenoid Valve

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted y Pilot valve option !

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 L4 max Size (mm) E3 = E1 = Y = 10 X L1 L3 max Size 3 to 8 Y-1 5-( 8-Y) to (Y-1 ) L2 = 10 15 L4 = 9-(14-X) to (X-3) 5 to 14 X-3 3 to 9 Y-1.5 6-( 2-Y) to (Y-1.5) L1 = L3 = 15 20 10-(18-X) to (X-4) 8 to 18 X-4 3 to 10 Y-1.5 7-(10-Y) to (Y-1.5) 20 30 10-(20-X) to (X-4.5) 10 to 20 X-4.5 5 to 13 Y-2 8-(13-Y) to (Y-2 ) X = 30 40 10 to

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5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

ZP

C B Y C D H Model Model Misc.

Air Cylinder

8 K K i w e y y u !1 !7 !9 !8 CJP CJ2 CJ2 JCM CM2 With auto switch CM3 10, 16 Rubber bumper CG1 K w e u y !0 t r i !6 !5 !1 !7 CG3 JMB MB MB1 With auto switch CA2 10, 16 Air cushion CS1 CS2 w e u y o t !0 r i !6 !5 !1 !3 !4 !2 !7 K With auto switch Component Parts No. Description Material Note 10 Piston seal NBR No.

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .