Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 3/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical
Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 3/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: P (Rc Female Thread), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: Size 3, Orifice Size: ø4.5, Fitting Size: 3/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -
Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -
Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Rc Female Thread, Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -
Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -
Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical
Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical
Table of Contents + 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator
+ 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator
) 155 (3 position) 44 55 77.5 121 12 14 1 PB PA 5 3 R 21 39 54 65 4-Rc1/8 (pilot pressure exhaust port) P SMC R1 R2 17 17 6-Rc3/8 (ports P, R) 26.5 26.5 L: Dimensions n: Stations Formula 10 9 8 7 6 5 4 3 2 1 L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119 8 Series VQ7-6 Optional Manifold Parts Blank plate assembly Blocking
A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position) 145 (Double) 55 77.5 121 PA 14 PB 12 1 R 3 5 65 54 P 39 (Pilot pressure EXH port) 4-1/8 SMC 21 R2 R1 17 17 (P , R port) 6-3/8 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377
+ 72 L2= 43n + 84 LENGTH FORMULA L1= 71n + 66 L2= 71n + 90 L1= 56n + 90 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 3 SIZE 2 SIZE 1 n L n 10 n L 3 2 4 5 6 8 7 9 10 5 6 7 8 9 10 2 3 4 6 5 7 8 9 2 3 4 L 279 421 492 634 563 705 776 370 482 426 538 594 650 L1 208 350 L1 158 201 244 502 287 373 330 416 459 L1 202 258 314 587 445 516 658 729 800 374
Unit n: Station L: Dimensions n L L1 L2 Equation L1=43n+64 L2=43n+76 L3 297 340 383 426 469 512 555 598 641 L3=43n+211 2 150 162 3 193 205 4 236 248 5 279 291 6 322 334 7 365 377 8 408 420 9 451 463 10 494 506 ( ): In case of direct manual override style.