Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Faston Terminal, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 12 VDC, Electrical Entry: Grommet, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7. Special electrical entry direction 2

CQ2

NPN) IC 5V A76H A96V A96 200V A72H A72 Yes Reed switch Grommet A73H A73 12V 100V A93V A93 Relay, PLC IC No 2 wire 5V, 12V 100V A90V A90 A80H A80 24V Yes 12V A73C Connector IC No 5V, 12V 24V A80C Diagnostic (2 color) Yes Grommet A79W IC 5V, 12V F7NV F79 3 wire (NPN) 12V F9NV F9N IC 5V, 12V F7PV F7P 3 wire (PNP) Grommet F9PV F9P F7BV J79 12V F9BV F9B 2 wire Solid state switch J79C Connector

CJ2

Rail mounting Grommet C73 C80 C73C C80C 100V 12V Band mounting CDJ2B16-60-B No IC 100V 5V, 12V Relay PLC 2 wire Yes 24V 12V Connector No 24V 5V, 12V IC Diagnostic indication (2 color) Grommet Yes H7A1 H7A2 H7B H7C H7NW H7PW H7BW F79 F7P J79 3 wire (NPN) IC 5V, 12V Grommet 3 wire (PNP) 2 wire 12V Connector 3 wire (NPN) F79W F7PW J79W 5V, 12V IC Diagnostic indication (2 color) Relay PLC 3 wire

Hydraulic

PLC Relay, PLC PLC Relay, PLC PLC IC circuit Yes 5V 12V 12V 5V, 12V 5V, 12V Grommet Reed switch Solid state switch No IC circuit 2-wire 24V Terminal conduit 12V Relay PLC 100V, 200V Yes DIN terminal Diagnostic indication (2-color display) Grommet 3-wire (NPN) 3-wire (PNP) 24V IC circuit 5V, 12V Grommet 100V, 200V 12V 5V, 12V 12V 2-wire 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP

C95

5V,12V 100V,200V Grommet Relay PLC 24V 2 wire 5V,12V IC No 200V or less 12V Diagnosis indication (2 colour) Yes 3 wire (NPN) 50,63 BT-05 IC 5V,12V 24V 3 wire (PNP) 100V,200V 2 wire 12V 3 wire (NPN) IC 5V,12V 80,100 BT-06 Diagnosis indication (2 colour) Relay PLC 3 wire (PNP) Grommet Yes 12V 24V 2 wire Water resistant (2 colour) Diagnosis output (2 colour) With timer 3 wire

CG1

40mm 50mm 63mm Relay PLC 100V or less 5V, 12V C80 No IC 12V C73C Yes Connector 24V or less 5V, 12V C80C No IC B59W Yes Grommet Diagnostic indication (2 colour) 3 wire (NPN) H7A1 G59 5V, 12V IC Grommet 3 wire (PNP) H7A2 G5P H7B K59 2 wire 12V H7C Connector 3 wire (NPN) H7NW G59W 5V, 12V IC Diagnostic indication (2 colour) Relay PLC 3 wire (PNP) H7PW G5PW Yes 24V H7BW K59W 2 wire

Air Cylinder Series CM2

5V, 12V 12V Terminal conduit Relay, PLC Yes Yes No No No Yes Yes Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5V,12V 12V Diagnostic indication (2-color indication) Grommet 2-wire Water resistant (2-color indication) 4-wire (NPN) IC circuit 5V, 12V With diagnostic output (2-color indication) 3-wire (NPN equivalent) A96 IC circuit 5V A93 A90 B54 B64 C73C C80C A33A A34A A44A B59W

CL

C76 5V IC Yes MGP C73 C80 B53 B54 B64 C73C C80C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA G5NT H7NF 12V 100V Relay, PLC IC No 5V, 12V 100V or less Grommet 12V PLC MGQ Reed switch Solid state switch Yes 12V 100V, 200V No 12V 200V Relay, PLC 2 wire 24V MGG Yes 12V Connector No IC 5V, 12V 24V or less 12V MGC PLC Terminal conduit 100V, 200V 12V Yes Relay,

Combination Cylinder

C76 5V IC Yes MXF C73 C80 B53 B54 B64 C73C C80C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA G5NT H7NF 12V 100V Relay, PLC IC No 5V, 12V 100V or less Grommet 12V PLC MXW Reed switch Solid state switch Yes 12V 100V, 200V No 12V 200V Relay, PLC 2 wire 24V MXP Yes 12V Connector No IC 5V, 12V 24V or less MG 12V PLC Terminal conduit 100V, 200V 12V Yes Relay,

MY1

A90 A90V No 3 wire Z76 G 5V G G G 24V 2 wire Yes Grommet Grommet A93 A93V 100V 12V 100V 12V Z73 G G G G G Yes 24V 2 wire 3 wire (NPN equiv.) 3 wire (NPN) 3 wire (PNP) 100V or less 5V 12V A96 A96V No Z80 5V G G G G 3 wire (NPN) 3 wire (PNP) F9N F9NV Y59A G Y69A G G G G 5V 12V F9P F9PV Y7P G Y7PV G G G G F9B 2 wire 2 wire F9BV 12V Y59B G Y69B G G G G 12V 24V Grommet Yes 3