Model: Size 1, Orifice Size: ø2, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 12 VDC, Electrical Entry: Faston Terminal, Special Electrical Entry: -, Spacer: -

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 1/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 1/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor)

VS7-6

VS7-6-FG-S AXT500-12-2 VFS3000-17-2 AXT500-13 AXT500-13 AXT500-13 AXT503-35 AXT503-35 AXT503-35 AXT503-12-1 AXT503-12-1 AXT503-12-1 MY-11N MY-11N MY-11N Description No.

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7. Special electrical entry direction 2

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: None, Spacer: w/Spacer

VQZ1000/2000/3000

17.5) 38 U side D side Stations 1 2 3 n (43) 2.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

Base Mounted Metal Seal/Rubber Seal Series VQ

One-touch fitting for 4 C6: One-touch fitting for 6 ~ = 4.5 Mounting hole for M3 Mounting hole for M2.5 ~ = 4.5 Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n

5 Port Solenoid Valve

38 U side D side Stations 1 2 3 n (22.5) 0.5 DIN rail clamping screw 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread (43) 2.5 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n

5 Port Solenoid Valve Series VQZ1000/2000/3000

.: 3.2, 4, 6 45.5 2.5 SQ 10.5 (5) Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 Dimensions VFS L n 1 7.5 2 3 4 5 6 7 8 11 9 10 12 29 L1 L2 L3 18 31 42 53 64 75 86 97 108 141 119 130 152 VFR 50 62.5 75 87.5 100 112.5 125 125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173 148 160.5 185.5 n L L1 L2 L3 13 14 16 17 18 21 22 24 VQ7 15 19 20 23 163 174 196 207 218 251

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

Please contact us for the latest version.sales@ocaire.com, SIDE PANEL B FOR IDFB8E-11N, OTHERS, AIR PREP SPECIAL, 21, AIR PREP SPL NO SIZE RATING, 1.01475 lb

Substantial reduction of installation labor hours , Max. operating pressure: 1.0MPa , Max. operating temperature: IDF 60 C, IDU 80 C, Applicable dryer: IDF1E to 75E, IDU3E to 75E, UPPER PANEL (IDFB22E-11N), OTHERS, AIR PREP SPECIAL, 21, AIR PREP SPL NO SIZE RATING, 2.64 lb

Please contact us for the latest version.sales@ocaire.com, V-OPTION KIT (IDFB15E-11N-V), OTHERS, AIR PREP SPECIAL, 22, AIR PREP SPL NO SIZE RATING, 1.32 lb

Please contact us for the latest version.sales@ocaire.com, V-OPTION KIT (IDFB4E-11N-V), OTHERS, AIR PREP SPECIAL, 22, AIR PREP SPL NO SIZE RATING, 1.01475 lb