Model: Size 1, Orifice Size: ø2, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 12 VDC, Electrical Entry: Faston Terminal, Special Electrical Entry: -, Spacer: -

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 1/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: [NPT] NPT, Nominal Designation of Piping Thread: 1/8, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 1 (1/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor)

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

VS7-6

VS7-6-FG-S AXT500-12-2 VFS3000-17-2 AXT500-13 AXT500-13 AXT500-13 AXT503-35 AXT503-35 AXT503-35 AXT503-12-1 AXT503-12-1 AXT503-12-1 MY-11N MY-11N MY-11N Description No.

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7. Special electrical entry direction 2

VQZ1000/2000/3000

17.5) 38 U side D side Stations 1 2 3 n (43) 2.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 (22.5) 0.5 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3.2 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

Base Mounted Metal Seal/Rubber Seal Series VQ

One-touch fitting for 4 C6: One-touch fitting for 6 ~ = 4.5 Mounting hole for M3 Mounting hole for M2.5 ~ = 4.5 Residual pressure release manual override Residual pressure release manual override DIN rail clamp screw 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n

5 Port Solenoid Valve

38 U side D side Stations 1 2 3 n (22.5) 0.5 DIN rail clamping screw 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting assembly C4: 4 one-touch fitting assembly C6: 6 one-touch fitting assembly M5: M5 thread (43) 2.5 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n

5 Port Solenoid Valve Series VQZ1000/2000/3000

.: 3.2, 4, 6 45.5 2.5 SQ 10.5 (5) Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 Dimensions VFS L n 1 7.5 2 3 4 5 6 7 8 11 9 10 12 29 L1 L2 L3 18 31 42 53 64 75 86 97 108 141 119 130 152 VFR 50 62.5 75 87.5 100 112.5 125 125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173 148 160.5 185.5 n L L1 L2 L3 13 14 16 17 18 21 22 24 VQ7 15 19 20 23 163 174 196 207 218 251