High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen.

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9B--Solid State, Gen.

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: L (L Type Plug Connector)

Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: -

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Table of Contents

EVS Applicable terminal: 1.25-3.5M, 1.25Y-3L, 1.25-3M Although A, B+ and B marks are indicated on the terminal block, VFR5000 can be used as either +COM or COM.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

or ring type, size 4, 22-16 AWG) NVFR4000, SOOO: 1.2S-3.SM, 1.2SY-3L, 1.25Y-3M e(+. -) indicate the direction of DC solenoid valve with light or with surge voltage suppressor.

RS2H-OM0045P

E2E-X2D1-N () DC1224V(DC1030V),(P-P) () 0.8mA 1.5kHZ () 3100mA (LED) (LED) -2570() 3595%RH 1 2 3V AC1000V 1055HZ1.5mmXYZ 2h 2(50G) XYZ 10 500m/S IEC IP67(JEM IP67G ) 1)100mA 2m 2) 8-2. -19-19-19-90 -19-19-1920 - 1. 2. 3. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 1. 2. 1. 2. 3. 1. 2. 3. () 4. 5. 1. 2. 1. 2. 1. ON (ON) 1. , 2. ON 3. 60 4.

SY

Caution Interface Regulators Specifications ARBY3000--2 A1 B1 ARBY5000--P-2 ARBY5000--2 A1 B1 ARBY3000--P-2 Interface regulator model Applicable solenoid valve model Regulated port Regulating pressure range Maximum operating pressure Fluid Ambient and fluid temperature Pressure gauge port size A B SY3 1 40(R) SY 1 40(R) P A B P 0.1 to 0.7MPa 0.7MPa Air Maximum 50C M5 x 0.8 46g (with 05), 50g

RSH/RS1H

Indicator light Detection indication (Red LED) Set operation indication (Green LED) Lever detection switch 25 to 70C (No freezing) Ambient temperature Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G

Air Slide Table/Long Stroke Type Series MXY

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Caution Interface Regulators Specifications ARBY3000--P-2 ARBY3000--2 A1 B1 ARBY5000/7000--P-2 ARBY5000/70--2 A1 B1 Interface regulator model Applicable solenoid valve model Regulated port Regulating pressure range Maximum operating pressure Fluid Ambient and fluid temperature Pressure gauge port size A B SY3 1 40(R) SY 1 40(R) P A B P 0.1 to 0.7MPa 0.7MPa Air Maximum 50C M5 46g (with 05), 50g

Heavy Duty Stopper Cylinder Series RSH/RS1H

Indicator light Detection indication (Red LED) Set operation indication (Green LED) Lever detection switch 25 to 70C (No freezing) Ambient temperature Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G

RSH

Impact Endurance 500m/s (About 50G) XYZ direction 10 times Enclosure IEC standard IP67 (JEM standard IP67G Drip proof, Oil proof) Note 1) At load current 100mA and cord length 2m Note 2) Between case and whole charging part Dimensions E2E-X1C1 (RSH20/32) 25 17.5 8 15 * Indicator light * Polyvinyl chloride round cord (Oil and vibration proof) 0.14mm2 X 3 wire O.

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G), X,