XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: L (L Type Plug Connector

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen.

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen.

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor:

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Open, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: -

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge

MGP

Z80 No IC circuit 3 wire (NPN) Y59A Y69A 5V 12V IC circuit 3 wire (PNP) Y7PV Y7P P.5.3-40 2 wire 12V Y59B Y69B 3 wire (NPN) Solid state switch Relay PLC Grommet Yes 24V Y7NW Y7NWV IC circuit 5V 12V Diagnostic indication (2 color) 3 wire (PNP) P.5.3-48 Y7PW Y7PWV Y7BW Y7BWV 12V 2 wire Water resistant (2 color) Y7BAL P.5.3-63 PLC: Programmable Logic Controller *Lead wire 0.5m (Example) 3mL 5mZ

MU

female thread F79W F7NWV 3 wire (NPN) 5V 12V IC 3 wire (PNP) F7PW Relay, PLC Diagnostic indicator ( 2 color) 24V Yes J79W F7BWV 2 wire 12V Rod end male thread M Water resistant (2 color) F7BA Grommet 3 wire (NPN) With timer F7NT 5V 12V IC With diagnostic output (2 color) Latch with diagnostic output (2 color) F79F 4wire (NPN) F7LF 0.5m (Example) 3mL A80C A80CL A80CZ A80CN 5mZ

CQ2

With diagnostic output (2 color) F79F 4 wire (NPN) Latch with diagnostic output (2 color) F7LF Lead wire length 0.5m (Example) A80C 5mZ (Example) A80CZ 3m L (Example) A80CL None N (Example) A80CN Solid state switches marked with a are manufactured upon receipt of order.

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-G5W, D-K59W, D-G5BAL and D-G59F can not be attached on 40 and 50 lubrication style cylinder. 5mZ EX.)A53Z N EX.)A53N 3.4-12 End Lock Cylinder Series CBA1 Specifications Maintains the cylinders original position even if the air supply is interrupted.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

D-G5W, D-K59W, D-G5BAL and D-G59F can not be attached on 40 and 50 lubrication style cylinder. 5mZ EX.)A53Z N EX.)A53N 3.8-12 End Lock Cylinder Series CBA1 Specifications Maintains the cylinders original position even if the air supply is interrupted.

Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type

SJ3260-5MZ-C6 (1 set) SJ3260-5CZJ-C6 (1 set) Double solenoid, with switch (24 VDC) SUP/EXH block mounting position Specify the required specifications (including port sizes other than 8) by means of the manifold specification sheet.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: M (M Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

Valve Type: Normally Closed, Bellows Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard

RS2H-OM0045P

E2E-X2D1-N () DC1224V(DC1030V),(P-P) () 0.8mA 1.5kHZ () 3100mA (LED) (LED) -2570() 3595%RH 1 2 3V AC1000V 1055HZ1.5mmXYZ 2h 2(50G) XYZ 10 500m/S IEC IP67(JEM IP67G ) 1)100mA 2m 2) 8-2. -19-19-19-90 -19-19-1920 - 1. 2. 3. 1. 2. 3. 4. 5. 6. 7. 1. 2. 1. 2. 1. 2. 1. 2. 3. 1. 2. 3. () 4. 5. 1. 2. 1. 2. 1. ON (ON) 1. , 2. ON 3. 60 4.

SY

Caution Interface Regulators Specifications ARBY3000--2 A1 B1 ARBY5000--P-2 ARBY5000--2 A1 B1 ARBY3000--P-2 Interface regulator model Applicable solenoid valve model Regulated port Regulating pressure range Maximum operating pressure Fluid Ambient and fluid temperature Pressure gauge port size A B SY3 1 40(R) SY 1 40(R) P A B P 0.1 to 0.7MPa 0.7MPa Air Maximum 50C M5 x 0.8 46g (with 05), 50g