XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

For Water Digital Flow Switch Series PFW

For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire

PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

CLS

The lock is released by screwing in the manual release bolt until the white mark of the lock monitor on the top of the brake cylinder moves to the FREE position. 140 160 180 200 250 Bore size (mm) 125 M6 x 1.0 x 35l M6 x 1.0 x 40l M8 x 1.25 x 40l M10 x 1.5 x 50l M10 x 1.5 x 55l M12 x 1.75 x 70l Manual release bolt Screw depth 30 32 35 40.5 45 55 In the case the manual release bolt is not

CQ2

X 45 l X 50 l X 55 l X 60 l X 65 l X 100 l X 125 l X 150 l 8 X 110 l X 135 l M10 X 65l X 70l X 75l X 80l X 85l X 90l X 95l M5 X 40l M5 X 45l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l 15 10.5 7.5 X 100 l X 105 l X 130 l X 155 l M10 X 75l M5 X 40l X 115 l X 140 l X 80l X 85l X 90l X 95l X 45 l X 50 l X 55 l

Table of Contents

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output M3 x 5L DC (+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC () Blue 1 2.

Shock Absorbers and Rate Controls

(iltodel) (rtolog l,lo, (lttodel) I ( t) t t( l(r wf wt ryrrl t44 162 58 l3l4-12 l.lN 38 44 TI 5l 't0 LR0EMrAxl 144 162 58 t3la.12 UN l 3 38 44 92 23 5l l0 0t[%r2 195 213 58 l3/+12 UN l 3 38 44 8 23 LR0tIUl316x2 t95 213 58 l314-12 U t3 38 44 | 8 23 2l 5l t2 0t r/x3 216 264 58 Ir7r.12lJti t3 38 44 143 23 2t 5l t 2 LR0E[tl%xl 1 7 5 r93 77 2'lz l2 UN t9 50 57 l t 4 26 26 70 l2 lEfill7sr2 225

SQ1000/2000

A port 10 Example) SQ1141-5L-C6-A (N.O. specification) A port plug O-ring Example) SQ1141-5L-C6-B (N.C. specification) B port B port plug Example) SQ1141-5L-C6-B-M (B port plug with manifold block) Direct exhaust outlet with built-in silencer [-S] The exhaust outlet is placed on the top side of the manifold end plate. The built-in silencer provides highly effective noise reduction.

CNS

CLQ 5 5 4 x 40l 4 x 40l 4 x 40l 125 140 160 IY-12 IY-14 IY-16 0.065 0.117 25 79.5 69.5 MLGP Dd9 0.065 0.117 28 86.5 76.5 0.080 0.142 32 94.5 84.5 RLQ 2-d MLU ML1C I Type Single Knuckle Joint DMaterial: Cast iron MM A2 8 -X Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part no.

MY1

Floating with flat bar Floating with round bar Bracket +0.3 112 +0.3 +0.1 20 150 Floating Bracket Positioning hole (10 x 18l) Bracket mounting hole (80) Hexagon socket head cap screw (M10 x 1.5 x 40l) Bracket mounting hole (100) Hexagon socket head cap screw (M12 x 1.75 x 40l) Mounting bracket 31 18 C B A Hexagon Socket Head Cap Screw TighteningTorque (Nm) A 181 221 B (max) 15 15 C (min)

Table of Contents

Floating with flat bar Floating with round bar Bracket +0.3 112 +0.3 +0.1 20 150 Floating Bracket Positioning hole (10 x 18l) Bracket mounting hole (80) Hexagon socket head cap screw (M10 x 1.5 x 40l) Bracket mounting hole (100) Hexagon socket head cap screw (M12 x 1.75 x 40l) Mounting bracket 31 18 C B A Hexagon Socket Head Cap Screw TighteningTorque (Nm) A 181 221 B (max) 15 15 C (min)

Cylinder with Lock Series CLS

IY-12 IY-14 IY-16 125 140 160 69.5 2-d 28 0.065 0.117 4 x 40l 86.5 76.5 32 0.080 0.142 4 x 40l 94.5 84.5 I Type Single Knuckle Joint MM A2 8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 No.

Cylinder with Lock Series CNS

IY-12 IY-14 IY-16 125 140 160 79.5 69.5 2-d 4 x 40l 86.5 76.5 4 x 40l 32 0.080 0.142 94.5 84.5 I Type Single Knuckle Joint MM A2 8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part No.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Digital Flow Switch for Deionized Water and Chemicals Digital Flow Switch for Deionized Water and Chemicals Body and sensor Body and sensor New PFA New PFA Tube Tube Super PFA Super PFA Three types of flow range 0.4 to 4l/min (PF2D504) 1.8 to 20l/min (PF2D520) 4.0 to 40l/min (PF2D540) Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

HRX-OM-X084

/min) / 0.11(at 5L/min) Pump capacity (50/60Hz) For option T10.35(at 5L/min) / 0.35(at 5L/min Rated fiow (50/60Hz) 7 L/min 5 / 5 For option T15 / 5 Flowdisplay range21 L/min 2 to 16 Circulating fluid system Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM) Particle filter nominal filtration rating20 m 35 Bypass

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

Low Differential Pressure Sensor

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.