Modular F.R.L. Pressure Control Equipment

ARG20(K) AR20P-410S AR20P-150AS AR20P-050AS ARG20P-400S GB2-10AS ARG20P-420S AR20KP-020AS ARG20K, 30K, 40K Note Qty. No.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IRV Direct operated precision regulator now available as a series!! (ARP20/30/40) VEX SRH SRP Applications Applications SRF a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR-A 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IR Direct operated precision regulator now available as a series!! (ARP20/30/40) IRV VEX SRH Applications Applications SRP a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

REGULATOR

/50K-B/60K-B Bracket assembly Panel mounting disassembly drawing Bracket assembly Mounting screws (2 pcs) Bracket Products Bracket assembly AR20K-B / 25K-B / 30K-B / 40K-B Bracket assembly Bracket assembly B / 60K-B AR50K-B / 60K (Roulette faces) (Roulette faces) Bracket assembly (Concave) Set nut (Convex) Products Bracket 14 9.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

rep-modular-e

AW30K/40K Note) The flow direction can be changed by taking off the check valve assembly, and replacing it with the square embedded gauge, pressure gauge adaptor assembly and plug assembly. 422 AW60(K) Exploded View 4 Mounting screws (4 pcs) Stem assembly (Convex) Actuators Modular F.R.L.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

AW30K/40K Note) The flow direction can be changed by taking off the check valve assembly, and replacing it with the square embedded gauge, pressure gauge adaptor assembly and plug assembly. 422 AW60(K) Exploded View 4 Mounting screws (4 pcs) Stem assembly (Convex) Actuators Modular F.R.L.

Modular Type Regulator Series AR

AR20K AR25K to 40K (-06) AR50K, 60K Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Aluminum die-cast Polyacetal 1 2 Replacement parts Part no. Material Description No.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed. 

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