Aluminum High Vacuum Angle Valve XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9B--Solid State, Gen.
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen.
Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2 (Refresh), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length
Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 1 pc, Valve Open, Voltage: 220 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor
Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Open, Voltage: 220 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light
Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Refresh, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor
Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
(Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.
Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.
(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.
MVGQM12-30-Z73-B 1 SFJ3130-5LZ-MA 1 For the applicable auto switch model, refer to page 10-16-5. Auto switches are shipped together, (but not assembled). Lead wire length for auto switch Cylinder stroke (mm) Refer to Standard Stroke on page 10-16-5.
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases. Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. The XLFV valves are single-acting, normally closed.
(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet. 34 Series SYJ5000 Flat Ribbon Cable Manifold Multiple valve wiring is simplified through the use of the flat cable connector.
(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
By combining the reference points of these two pieces of data, you will be able to see the CAD data of the SY5140-5LZ-02.