High Vacuum L Type Valve -16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K [mm] LEYG L (Ball bushing bearing) [mm] LEYG M (Sliding bearing) X Size Stroke range (mm) L DB Size Stroke range (mm) L DB 25 15 to 110 91 10 115 to 190 115 195 to 300 133 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 (0.5) Section XX Z WB WA 32 20 to 110 97.5 13 115 to 190 116.5 195 to 300 134 32
Select [Applicable tubing O.D.: 4 or more, Connection thread: Rc1/8]. 6 Electric Actuator/Rod Type Series LEY Dimensions: In-line Motor Type Body bottom tapped/LEY63;;;-;;U XA H9 depth XA 6 x MO thread effective depth MR MH Section XX details MD Section XX MC L MA ML + Stroke XA H9 XA XB [mm] Size Stroke L MA MC MD MH ML MO MR XA XB range [mm] 24 50 20 to 74 45 60.5 65 75 to 124 63 37.4 38
H9 depth XA LEPY LEPS LER MH LEH MD MA MC ML + Stroke LEY -X5 LEY -X5 Section XX Section XX details 11LEFS XA H9 XA XB Note 1) Range within which the rod can move.
XA H9 XA LEC LEC S LEC SS-T Note 1) Do not allow collisions at either end of the rod operating range at a speed exceeding pushing speed.
Combination between -XA and -XA (S, W shaft) Top port Shaft type Upper Lower Applicable size Symbol Description Combination S W Female thread at the end Female thread at the end Tip end of male thread Tip end of male thread Stepped round shaft Stepped round shaft Round shaft with steps and male thread Round shaft with steps and male thread XA 1 XA 2 XA 3 XA 4 XA 5 XA 6 XA 7 XA 8 XA 9 XA10
Symbol Description Applicable size 10 15 20 30 40 XA13 Shaft through-hole XA16 Shaft through-hole + Double shaft-end female thread Shortened shaft Reversed shaft XA19 XA20 D69 Series CRB2 Combination XA Combination Combination Symbol XA 1 XA 2 XA 3 XA 4 XA 5 XA 6 XA 7 XA 8 XA 9 XA10 XA11 XA12 XA13 XA14 XA15 XA16 XA17 XA18 XA19 XA20 XA21 XA22 XA23 XA24 XA1 XA2 XA3 XA4 XA5 XA6 XA7 XA8 XA9
Description Applicable size 10 15 20 30 40 Symbol Shaft through-hole XA13 XA16 XA19 XA20 Shaft through-hole + Double shaft-end female thread Shortened shaft Reversed shaft D103 Series CRBU2 Combination XA Combination Symbol XA 1 XA 2 XA 3 XA 4 XA 5 XA 6 XA 7 XA 8 XA 9 XA10 XA11 XA12 XA13 XA14 XA15 XA16 XA17 XA18 XA19 XA20 XA21 XA22 XA23 XA24 Combination XA1 XA2 XA3 XA4 XA5 XA6 XA7 XA8 XA9
MHW -X MRHQ (mm) MA G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 DC 30 36 42 NB 5h9 6h9 6h9 DO 34 40 48 NA 8 10 12 B 30 36 42 K 4 5 6 Q 6 7 8 AA 35 38 40 AB 32 35 37 J 10 12 14 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 Model MHS2-16D MHS2-20D MHS2-25D 0 -0.030 0 -0.030 0 -0.030 DVA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA
Closed EC Open EO D9 L 20J M5 x 0.8 (Finger closing port) G I 2 (mm) I RB 25 28 SA 4.5 5.5 Q 11 12 RA 38 44 Model MHS2-32D MHS2-40D G 30.5 32 FZ 5 6 FY 20.5 23.5 FX 23 26.5 CB 16 17 CA 8 9 EC 16 20 EO 24 28 DC 56 62 DO 64 70 B 56 62 L 2H9 3H9 AB 41 44 J 20 21 AA 44 47 NA 14 16 +0.025 0 +0.025 0 6 7 SB 8 9.5 UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 Model MHS2-32D MHS2-40D +0.025
Section XX XA H9 depth XA 4 x M OA thread depth OB XB 2 x NA thread depth NC XA H9 XA K X [mm] LEYGlM (Sliding bearing) [mm] LEYGlL (Ball bushing bearing) Size Stroke range (mm) L DB Size Stroke range [mm] L DB (0.5) Section XX 25 15 to 55 67.5 12 60 to 185 100.5 190 to 300 138 25 15 to 110 91 10 115 to 190 115 195 to 300 133 Z WB WA WC + Stroke 32 20 to 55 74 16 60 to 185 107 190 to 300
H9 depth XA MH Section XX details (MB) ML + Stroke MA MC MD Section XX XB XA H9 XA 1 This is the range within which the rod can move when it returns to origin.
Example: -XA1A24 XA, XC combinations Combination other than -XA, such as Made to Order (-XC), is also available. Refer to pages 31 and 32 for detailed description of Made to Order.
XX (OL) HA: T-slot for hexagon bolt X0.02 X0.02 DA DB H VA VB PW X U T R PB J K G S Q GA GB 2 x P T-slot XA H9 depth XL 2 x P (Plug) A + Stroke B + Stroke C + Stroke PA + Stroke E FA FB XA H9 depth XL E *: The use of a slot (width XA, length XB, depth XC) allows for a relaxed pin pitch tolerance, with the pin hole (XAH9, depth XL) as the reference, without affecting mounting accuracy. *: