Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm

XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

High Vacuum Angle Valve, XL Series

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum

Variation: D (2-step Control, Single Acting/Bellows Seal, O-ring Seal), Flange Size: 40, Indicator, Actuator Port Direction: L (w/o Indicator, Actuator Port Direction on Rear Flange Surface), Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N (M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal), Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches

Variation: 2-step Control, Single Acting/Bellows Seal, O-ring Seal, Flange Size: 40, Indicator, Actuator Port Direction: w/o Indicator, Actuator Port Direction on Rear Flange Surface, Temperature Specifications, Heater: 5 to 60°C, w/o Heater, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Switch), Number of Switches, Mounting

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor:

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend CUJ Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Spring Return Spring Extend Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model CDQP2B12-5S -10S CDQP2B16-5S

CQS

x 45l x 50l M3 x 25l x 30l x 35l x 40l x 45l x 50l M5 x 25l x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l 6.5 6.5 Head

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L x 55L

CQS

3 contained in one kit, and can be ordered using the order number for each respective tube bore size. 2.2-12 Compact Cylinder/Standard: Double Acting Double Rod Series CQSW Mounting Bolt for CQSW Mounting bolt M3 X 30l X 35l X 40l X 45l X 50l X 55l M3 X 30l X 35l X 40l X 45l X 50l X 55l M5 X 35l X 40l X 45l X 50l Mounting bolt M5 X 55l X 60l X 65l X 70l X 75l X 80l M5 X 35l X 40l X 45l X

Digital Flow Switches

11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750 711 721 751 703H 706H 712H PF2A510 550 511 521 551 1 to 10 PF2A30 5 to 50 10 to 100 31 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 : Output from integrated display type and remote display unit type : Output from remote sensor unit type For Water P.12 16l/min 4l/min 100l/min 40l

Digital Flow Switches, Series PF2A, Series PF2W

11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750 711 721 751 703H 706H 712H PF2A510 550 511 521 551 1 to 10 PF2A30 5 to 50 10 to 100 31 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 : Output from integrated display type and remote display unit type : Output from remote sensor unit type For Water P.12 16l/min 4l/min 100l/min 40l

Battery-less

Motor type LEYGMA LEYGMB LEYGMC Battery-less absolute (Step motor 24 VDC) 200 mm/s 125 mm/s 75 mm/s Horizontal Mounting, Ball Bushing Bearing i L = 100 mm Max. speed = 200 mm/s or less u L = 50 mm Max. speed = 200 mm/s or less 10 10 LEYG32L E/40L E LEYG32L E/40L E LEYG32L E/40L E LEYG32L E/40L E Load mass m [kg] Load mass m [kg] LEYG25L E LEYG25L E LEYG16L E LEYG25L E LEYG16L E 1 1 LEYG16L

Proposals for Energy Saving

Digital Flow Switch for Air Digital Flow Switch for Water Series PFA Series PFA Series PFW Series PFW New New 12000l 6000l 3000l Flow rate 40l 500l Photo Flow rate Photo 200l 100l 16l 50l Photo 4l Photo 10l Size (port size)) Size (port size) Maximum Flow Rate 3000, 6000, 12000l/min The addition of the high flow rate types supports energy saving measures.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.