MHS

-25D MHSH3-25D M30.5 0.88 25D M30.5 0.88 MHSJ3-32D MHSH(J)3-32D M40.7 2.1 32D M40.7 2.1 40D M50.8 4.3 MHSJ3-40D MHSH(J)3-40D M40.7 2.1 50D M50.8 4.3 MHSJ3-50D MHSH(J)3-50D M50.8 4.3 63D M50.8 4.3 MHS3 MHSJ3-63D MHSH(J)3-63D M61 7.3 MHSJ3-80D MHSH(J)3-80D M61 7.3 Nm MHS3-16D M30.5 0.88 20D M30.5 0.88 25D M40.7 2.1 32D M40.7 2.1 40D M50.8 4.3 50D M50.8 4.3 63D M61 7.3 80D M61 7.3 MHSH(J)3

Compressed Air Preparation Filter

80D 14.5 90D Space-saving design, Reduced piping labor!

Air preparation filter

Assembly and replacement procedure Nominal No. of the tool Body size Bolt Auto drain Lock nut Nominal size Size Width across flats 70D 6 M8 24 80D 8 M10 90D 7-1. Bracket assembly A) Mount the bracket to the product. B) Mount a washer to the 2 mounting bolts respectively, and hold the bracket to the product. Tightening torque is 6.2Nm for 70D, and 12.5 Nm for 80D and 90D.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

High vacuum valve, XL, HIGH VACUUM VALVE, 0.00000 lb

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material:

A

MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

CATALOG

2 4H9 0~0.03 4 8 NOTE) FOR MHS2 AND MHS4 DIMENSIONS AND MORE TECHNICAL INFORMATION, REFER TO CAT:E246 MHS3-50D 4 52H9 0~0.074 2 4H9 0~0.03 4 7 MHS3-63D 5 65H9 0~0.074 2.5 5H9 0~0.03 5 7.5 MHS3-80D 6 82H9 0~0.087 3 6H9 0~0.03 6 9 (mm) Courtesy of Steven Engineering, Inc. !

AFF_17A

Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts e No.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

JXCx-OMY0008

When 800.00[mm](80d=13880h) is input. (5) 6023h 0-31 Target position 6023h: Target position = 00013880h Index 6030h: Alarm Index Bit Signal name Description Alarm code shown as a 3 digit decimal number when read numerical data is valid and alarm is generated. 5 Latest alarm code generated will be output to alarm 1. Alarm is updated by another alarm.

JXCx-OMY0004

The READY flag turns ON. 2 5 (Unused) Set always OFF(0) 6-7 (Unused) Set always OFF(0) 3 0-7 (Unused) Set always OFF(0) Byte4-7: Current position Byte Signal name Description Current position of the actuator is shown in multiples of 0.01mm when numerical data can be read. (5) 4 5 E.g.) 800.00[mm](80d=13880h) is output.

JXCx-OMT0005CN

=13880h 4Byte = 80h 5Byte = 38h 6Byte = 01h 7Byte = 00h 4 5 6 7 Byte8,9 Byte 1[mm/s] *5 300[mm/s]300d=012Ch 8Byte = 2Ch 9Byte = 01h 8 9 *5 21(P.85 35 - Byte10,11: Byte 10 1[%] *5 11 Byte12-15 Byte 12 0.01[mm] *5 800.00[mm]80d=13880h 12Byte = 80h 13Byte = 38h 14Byte = 01h 15Byte = 00h 13 14 15 Byte16-19 Byte 16 1 10 3 *5 1 1234 17 2 1 2 0 18 3 3 0 0 4 0 0 0 * 16.2.P.65

CL

Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.

Free Mount Cylinder Series CU

(Example): CDU20-80D Port thread type D Double acting Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Nil TN TF Long stroke (mm) 6, 10, 16 20, 25, 32 40, 50, 60 60, 70, 80, 90, 100 Applicable Auto Switches/Refer to pages 1263 to 1371 for further information on auto switches.

Combination Cylinder

Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.