AFF_17A

Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts e No.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

JXCx-OMY0008

When 800.00[mm](80d=13880h) is input. (5) 6023h 0-31 Target position 6023h: Target position = 00013880h Index 6030h: Alarm Index Bit Signal name Description Alarm code shown as a 3 digit decimal number when read numerical data is valid and alarm is generated. 5 Latest alarm code generated will be output to alarm 1. Alarm is updated by another alarm.

JXCx-OMY0004

The READY flag turns ON. 2 5 (Unused) Set always OFF(0) 6-7 (Unused) Set always OFF(0) 3 0-7 (Unused) Set always OFF(0) Byte4-7: Current position Byte Signal name Description Current position of the actuator is shown in multiples of 0.01mm when numerical data can be read. (5) 4 5 E.g.) 800.00[mm](80d=13880h) is output.

JXCx-OMT0005CN

=13880h 4Byte = 80h 5Byte = 38h 6Byte = 01h 7Byte = 00h 4 5 6 7 Byte8,9 Byte 1[mm/s] *5 300[mm/s]300d=012Ch 8Byte = 2Ch 9Byte = 01h 8 9 *5 21(P.85 35 - Byte10,11: Byte 10 1[%] *5 11 Byte12-15 Byte 12 0.01[mm] *5 800.00[mm]80d=13880h 12Byte = 80h 13Byte = 38h 14Byte = 01h 15Byte = 00h 13 14 15 Byte16-19 Byte 16 1 10 3 *5 1 1234 17 2 1 2 0 18 3 3 0 0 4 0 0 0 * 16.2.P.65

CL

Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.

Free Mount Cylinder Series CU

(Example): CDU20-80D Port thread type D Double acting Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Nil TN TF Long stroke (mm) 6, 10, 16 20, 25, 32 40, 50, 60 60, 70, 80, 90, 100 Applicable Auto Switches/Refer to pages 1263 to 1371 for further information on auto switches.

Combination Cylinder

Example) 40D-A3C-4, 50D-A3C-5, 63D-A3C-6, 80D-A3C-8, 100D-A3C-10 To order the mounting brackets separately, use the part number shown above.

CNA

CL Bore size (mm) 40 50 63 80 100 Part No. of lock unit MLGC CNA 40D-UA P 0.3MPa CNA 50D-UA CNA CNA 63D-UA Old CNA 80D-UA CB CNA100D-UA CV/MVG wHow to replace lock unit 1) Loosen the tie-rod nut (4 pcs.) on head cover of cylinder by using socket wrench. Refer to table below for applicable sockets.

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.

CA2

(Example) 40D-A3C-4 50D-A3C-5 63D-A3C-6 80D-A3C-8 100D-A3C-10 When other brackets are ordered separately, order by the above part numbers. Stainless steel mounting screw kit A set of stainless steel mounting screws (with set screws) described below is available and can be used as required by the operating environment.

CNA

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 To order the mounting brackets separately, use the part number shown above.

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

XMD/XYD Series

Step 4 Step 5 O ring S valve M valve Needle seat (XLD-25) S valve seal assembly (XLD-40,50) S valve seal assembly (XLD-63,80) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40 and 50, remove the dust from the initial pumping valve seal O ring.

Please contact us for the latest version.sales@ocaire.com, O-RING (XLD-100D-X510), VACUUM SERIES, XLD HIGH VACUUM VALVE, 21, XLD NO SIZE RATING, 0.022 lb

XLD NO SIZE RATING, .00000 lb