; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing)

2

(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80

(no built-in magnet), Number Of Switches: No switch, Seal Material: FKM 1349-80, Amount of leakage(Pa·m³/s): Internal: 1.3 × 10^-10, External: 1.3 × 10^-11, Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): -, Heater Yes/No: None

Replacement: A (Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing)

, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, CE-Compliant: -

1

Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added! Sub-plate newly added!

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)]

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: C (1pc, Valve Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)], Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: H7 (5 to 150°C, with 100°C at 100VAC, 120°C at 200VAC Heater)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: KF(NW), Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface)

Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std.