Proposals for Energy Saving

Digital Flow Switch for Air Digital Flow Switch for Water Series PFA Series PFA Series PFW Series PFW New New 12000l 6000l 3000l Flow rate 40l 500l Photo Flow rate Photo 200l 100l 16l 50l Photo 4l Photo 10l Size (port size)) Size (port size) Maximum Flow Rate 3000, 6000, 12000l/min The addition of the high flow rate types supports energy saving measures.

PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

For Water Digital Flow Switch Series PFW

For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface

CLS

The lock is released by screwing in the manual release bolt until the white mark of the lock monitor on the top of the brake cylinder moves to the FREE position. 140 160 180 200 250 Bore size (mm) 125 M6 x 1.0 x 35l M6 x 1.0 x 40l M8 x 1.25 x 40l M10 x 1.5 x 50l M10 x 1.5 x 55l M12 x 1.75 x 70l Manual release bolt Screw depth 30 32 35 40.5 45 55 In the case the manual release bolt is not

HRX-OM-K003

/min) (At 40L/min) Pump capacity (50Hz/60Hz) *3 MPa (58 / 87 [PSIG] (65 / 94 [PSIG] (58 / 87 [PSIG] (58 / 87 [PSIG] At 1.1 [gal/min]) At 7.9 [gal/min]) At10.6 [gal/min]) At10.6 [gal/min]) 2 to 16 8 to 50 Circulating fluid flow rate display range L/min (0.5 to 4.2 (2.1 to 13.2 gal/min) [gal/min]) Operating range of circulating fluid flow rate *4 [L/min] 3 to 16 (0.8 to 9 to 50 4.2[gal/min]

CQ2

X 45 l X 50 l X 55 l X 60 l X 65 l X 100 l X 125 l X 150 l 8 X 110 l X 135 l M10 X 65l X 70l X 75l X 80l X 85l X 90l X 95l M5 X 40l M5 X 45l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l 15 10.5 7.5 X 100 l X 105 l X 130 l X 155 l M10 X 75l M5 X 40l X 115 l X 140 l X 80l X 85l X 90l X 95l X 45 l X 50 l X 55 l

Cylinder with Lock Series CLS

IY-12 IY-14 IY-16 125 140 160 69.5 2-d 28 0.065 0.117 4 x 40l 86.5 76.5 32 0.080 0.142 4 x 40l 94.5 84.5 I Type Single Knuckle Joint MM A2 8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 No.

Cylinder with Lock Series CNS

IY-12 IY-14 IY-16 125 140 160 79.5 69.5 2-d 4 x 40l 86.5 76.5 4 x 40l 32 0.080 0.142 94.5 84.5 I Type Single Knuckle Joint MM A2 8 NDH10 Material: Cast iron (mm) Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part No.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Digital Flow Switch for Deionized Water and Chemicals Digital Flow Switch for Deionized Water and Chemicals Body and sensor Body and sensor New PFA New PFA Tube Tube Super PFA Super PFA Three types of flow range 0.4 to 4l/min (PF2D504) 1.8 to 20l/min (PF2D520) 4.0 to 40l/min (PF2D540) Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool

CNS

CLQ 5 5 4 x 40l 4 x 40l 4 x 40l 125 140 160 IY-12 IY-14 IY-16 0.065 0.117 25 79.5 69.5 MLGP Dd9 0.065 0.117 28 86.5 76.5 0.080 0.142 32 94.5 84.5 RLQ 2-d MLU ML1C I Type Single Knuckle Joint DMaterial: Cast iron MM A2 8 -X Applicable bore size (mm) A2 E1 MM NX RR1 U1 L1 NDH10 Part no.

MY1

Floating with flat bar Floating with round bar Bracket +0.3 112 +0.3 +0.1 20 150 Floating Bracket Positioning hole (10 x 18l) Bracket mounting hole (80) Hexagon socket head cap screw (M10 x 1.5 x 40l) Bracket mounting hole (100) Hexagon socket head cap screw (M12 x 1.75 x 40l) Mounting bracket 31 18 C B A Hexagon Socket Head Cap Screw TighteningTorque (Nm) A 181 221 B (max) 15 15 C (min)

Table of Contents

Floating with flat bar Floating with round bar Bracket +0.3 112 +0.3 +0.1 20 150 Floating Bracket Positioning hole (10 x 18l) Bracket mounting hole (80) Hexagon socket head cap screw (M10 x 1.5 x 40l) Bracket mounting hole (100) Hexagon socket head cap screw (M12 x 1.75 x 40l) Mounting bracket 31 18 C B A Hexagon Socket Head Cap Screw TighteningTorque (Nm) A 181 221 B (max) 15 15 C (min)

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

PF2D

Rated flow range of sensor Set flow rate range of sensor Sensor 4L/min 20L/min 40L/min 1.8L/min 0.4L/min Flow rate range 10L/min 0.4L/min 4L/min PF2D504 0.25L/min 4.5L/min 1.8L/min 20L/min PF2D520 1.3L/min 21L/min 4L/min 40L/min PF2D540 2.5L/min 45L/min Flow Rate Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 0.025 Pressure loss [MPa] Pressure