Compact Rotary Actuator Series CRQ2

Combination between -XA and -XA (S, W shaft) Symbol Description Top port Shaft type Upper Lower Applicable size Combination S W XA 1 XA 2 XA 3 XA 4 XA 5 XA 6 XA 7 XA 8 XA 9 XA10 XA11 XA12 XA13 XA14 XA15 XA16 XA17 XA18 XA19 XA20 XA21 XA22 XA23 XA24 Female thread at the end Female thread at the end Tip end of male thread Tip end of male thread Stepped round shaft Stepped round shaft Round shaft

1

Series MY1C XGH7 Long hole depth XG XH Bore size (mm) XH XA XB XD XE XG XJ XB 0.1 XB 0.1 16 20 25 32 40 50 63 40 40 80 40 4 9 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 40 100 50 4 9 5 51 50 110 55 5 10 6 XGH7 depth XG XA 66 60 140 70 6 11 7 81 80 180

MG

MGP MGPA12-150 MGP MGPA12-100 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 MGPA -200 32 32 40 40 0.2 0.4 MGP MGPA12-75 MGPA12-75 MGPA -150 32 32 40 40 0.15 0.3 MGPA -100 32 32 40 40 0.1 0.2 MGPA12-50 MGPA12-50 MGPA -50 32 40 MGPA -50 32 32 40 40 0.05 0.1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

CRBU

1 -XA 2 -XA 3 -XA 4 -XA 5 -XA 6 -XA 7 -XA 8 -XA 9 -XA10 -XA11 -XA12 -XA13 -XA14 -XA15 -XA16 -XA17 -XA18 -XA19 -XA20 -XA21 -XA22 -XA23 15, 20, 30 MSUB 10 15 20 30 Change in length of the standard product's chamfer part How to Order Change in length of the standard product's chamfer part 2 flat chamfers 2 flat chamfers Shaft through hole Shaft through hole and female thread Shaft through hole

CNG

M10 x 1.25 35.5 1/8 26.5 2.5 73 154 12 40 20 15 10 6.6 35 4.5 49.4 48 22 28 59.4 3 12 M5 x 0.8 6 14 M14 x 1.5 44 1/8 28 2.5 81 169 (178) 14 49 22 18 10 6.6 40 4.5 58.4 56 30 30 71.4 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H Z e f h Z ZZ 35 190 211 30 16 55 210 231 0.25 x Stroke 229 40 207 228 30 17 62 250 40 214 238 35 17 62 236 260 50 241 (250) 269 (278

CNG

32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg)

CNG

P K KA MM NA PG PH PL S FD FT FX FY FZ XA XB J l 0.25 ZZ 182 H e f h ZZ 202 35 30 16 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 220 198 40 30 17 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 5.5 7 60 30 75 3 12 M5 x 0.8 223 201 40 35 17 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 6.6 7 60 30 75 3 12 M5 x 0.8 247 (256) 227 (236) 50 35 17 70 6 14 M14 x 1.5 44

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

MGP

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

MGP

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL-OMY0002

XLD-80 18 16 14 XLD-50 12 10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD-63 AC90240V XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 /

ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (

17

40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101 300 200 11 (5) 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 110 (50) 110 (50) 100 100 100 80 80 80 Load mass m lbs (kg) Load mass m lbs (kg) 100 100 80 80 100 22 (10) 22 (10) 80 11 (5) 10 100 20 29 30 5051 300 200 11 (5) 10 100 20 29 30 50 51 300 200 Stroke (

Air Cylinder Series MB

80 m m 63 CLM2 32 50 40 CLG1 32 CL1 MLGC CNG MNB V V CNA Graph (6) Graph (3) P P CNS 100 80 CLS 63 100 50 40 CLQ 80 63 50 m m RLQ 32 40 MLU 32 !"

CJ2

D-A7 D-A80 D-A73C D-A80C 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 CP95 Symbol Specifications D-C7 D-C80 NCM -XA Change of rod end shape D-A7H D-A80H Band mounting style (6, 10, 16) -XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion NCA -XB7 Not available

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -XA and -XC (Refer to page 11-7-40 for made-to-order/details on -XC.)