Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 63, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -,

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 63, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -,

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 80, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC),

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: H

Vacuum Pad

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

Vacuum Pad

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

Vacuum Pad

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

Vacuum Pad

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLD HIGH VACUUM VALVE, 2X, XLD NO SIZE RATING, 1.76369 lb

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0