Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead

KQ2

Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G 38 One-touch Fitting Series KQ2 Series KQ2: White body Series KQ : Black body Release button Series KQ2: Light gray Series KQ : Blue Light force for removal When the fitting is removed from the tube, the chuck and collet are released, thus preventing them from biting into the tube excessively.

Solid State Switch with Prewired Connector Series D– mmPC

Applicable standards Cord length Connector type JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 0.5m 1.0m 3.0m M83 pin M84 pin M124 pin S M L A B D Impact resistance 300m/s {30, 6G} Enclosure IP-67 (standard IEC529) Note) Series D-P5DW is available with type D only. Withstand voltage Note) L is available for series D-P5DW only.

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, .00000 lb

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

MK

20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345 531 Calculation method/Example MKG20-10RFN I Standard calculation: MKB20-10R 250g I Extra weight calculation: Both ends tapped 6g

Proposals for Energy Saving

With hose nipple 6g Valve type Number of ports Total travel (T.T.) Piping Fluid Operating pressure Ambient and operating air temperature Effective area (Cv factor) Lubrication Fitting Weight (Basic type) Easy tubing connection with builtin hose nipple.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

M-3G Material PVC Applicable model M3 Stainless steel 304, NBR M-3G2 PVC M-5G1 Stainless steel 304, NBR M-5G2 Gasket Stainless steel 316, Special FKM M5 M-5G3 M-5AL-6, M-5ALH-6 M-5HL-4, 6, M-5HLH4, 6 Nylon 66, GF30% M-5GH For KQ2 M6 thread Stainless steel 304, NBR M6 M-6G KQ2 Series, 10-32 UNF 10-32 UNF M-10/32G M-01H-4, M-5H-4 M-5HL-4, M-5HLH-4 C3604 (With electroless nickel plated

This is a legacy product, and replaced byVFS2110-6G

This is a legacy product, and replaced byVFS2220-6G-02T

This is a legacy product, and replaced byVK334-6G, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, 2A, VK300 NO SIZE RATING, 0.18734 lb

IR1000/2000/3000

T PPA 8 8 stations Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 AL For high/low temperature environments Thread type (Thread on the manifold base) T L For high temperature For low temperature Nil N F Rc NPT G Accessory (Pressure gauge) Specifications Nil None Symbol

VM

Frequency Port size (Nominal size) Piston style 0.15 to 1.0MPa 5 to 60C (No freezing) VM/VR Red Green Orange Rc(PT) (6A) 40g VH 300 c.p.m or less R(PT) (6A) 1 8 1 8 Weight 6g Construction/Component Parts Construction/Component Parts w q Description Aluminum alloy Material Notes No. w q Description Brass Material Notes No.

FSQ seies

. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long lad wir.