VZ100/300/500

(Manifold base) VZ110-5LZ-M52 pcs. (Valve) DXT170-25-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ312-5LZ-M3 .2 pcs. (Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

MVGQ

MVGQM12-30-Z73-B 1 SFJ3130-5LZ-MA 1 For the applicable auto switch model, refer to page 10-16-5. Auto switches are shipped together, (but not assembled). Lead wire length for auto switch Cylinder stroke (mm) Refer to Standard Stroke on page 10-16-5.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet. 34 Series SYJ5000 Flat Ribbon Cable Manifold Multiple valve wiring is simplified through the use of the flat cable connector.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

By combining the reference points of these two pieces of data, you will be able to see the CAD data of the SY5140-5LZ-02.

Digital Flow Switches

output NPN or PNP open collector (same as switch output) Illuminates up when output is ON OUT1: Green; OUT2: Red 1 sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode Note 6): 3-digit fixed 12 to 24 VDC (ripple 10% or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no freezing and condensation) 1000 VAC for 1 min. between external terminal and case 50M

Digital Flow Switches

output) Lights up when output is ON OUT1: Green; OUT2: Red 1sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode: 3-digit fixed Note 5) Status LED's Response time Hysteresis Power supply voltage 12 to 24VDC (ripple 10% or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no condensation and freezing) 1000VAC for 1 min. between external terminal and case 50M

Digital Flow Switches, Series PF2A, Series PF2W

output) Lights up when output is ON OUT1: Green; OUT2: Red 1sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode: 3-digit fixed Note 5) Status LED's Response time Hysteresis Power supply voltage 12 to 24VDC (ripple 10% or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no condensation and freezing) 1000VAC for 1 min. between external terminal and case 50M

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Battery-less

Make sure workpieces mounted on the table do not interfere with other workpieces or the facilities around the table. *3 Position after returning to origin *4 [ ] for when the direction of return to origin has changed Model L A B n D E Without lock With lock LEFS32Em-50m 332 384 56 180 4 LEFS32Em-100m 382 434 106 230 4 LEFS32Em-150m 432 484 156 280 4 LEFS32Em-200m 482 534 206 330 6

Electric Actuators

Dimensions [mm] Model L1 L2 A B C D E F G J K 138 LEPS10m-25m 152.5 20 22 30 29 20 29 39 88.2 61.8 LEPS10m-50m 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10Lm-25m 124 138.5 20 22 30 29 20 29 39 88.2 47.8 LEPS10Lm-50m 149 163.5 24 43 34 50 24 50 60 113.2 19 Series LEPY/LEPS Specific Product Precautions 1 Be sure to read before handling.

MY1

Example) D-Y59AL Impact resistance 1000m/S Insulation resistance 50M or more at 500VDC (between lead wire and case) Withstand voltage 1000VAC for 1min.

CE

Auto Switch Common Specifications Type Reed switch Solid state switch 3 wire: 10A or less 2 wire: 1mA or less None Leakage current 1ms or less Note 3) 1.2ms Operating time 1000m/s {102G} 300m/s {30.6G} Impact resistance 50M or more with a 500VDC megohmmeter (between lead wire & case) Insulation resistance 1000VAC for 1 min.

Proposals for Energy Saving

consumption Withstand voltage Insulation resistance Noise resistance Vibration resistance Impact resistance Weight Enclosure Port size (Rc, NPT, G) 1s or less Note 3) Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3 digits) 12 to 24VDC (ripple 10% or less) 160mA or less 170mA or less 150mA or less 1000VAC for 1 min. between external terminal block and case 50M