Table of Contents

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output M3 x 5L DC (+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC () Blue 1 2.

Shock Absorbers and Rate Controls

(iltodel) (rtolog l,lo, (lttodel) I ( t) t t( l(r wf wt ryrrl t44 162 58 l3l4-12 l.lN 38 44 TI 5l 't0 LR0EMrAxl 144 162 58 t3la.12 UN l 3 38 44 92 23 5l l0 0t[%r2 195 213 58 l3/+12 UN l 3 38 44 8 23 LR0tIUl316x2 t95 213 58 l314-12 U t3 38 44 | 8 23 2l 5l t2 0t r/x3 216 264 58 Ir7r.12lJti t3 38 44 143 23 2t 5l t 2 LR0E[tl%xl 1 7 5 r93 77 2'lz l2 UN t9 50 57 l t 4 26 26 70 l2 lEfill7sr2 225

2-Color Display

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Mounting screw M3 x 5L The tightening torque for bracket mounting screw should be 0.5 to 0.7 Nm.

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

SQ1000/2000

A port 10 Example) SQ1141-5L-C6-A (N.O. specification) A port plug O-ring Example) SQ1141-5L-C6-B (N.C. specification) B port B port plug Example) SQ1141-5L-C6-B-M (B port plug with manifold block) Direct exhaust outlet with built-in silencer [-S] The exhaust outlet is placed on the top side of the manifold end plate. The built-in silencer provides highly effective noise reduction.

HRX-OM-X084

/min) / 0.11(at 5L/min) Pump capacity (50/60Hz) For option T10.35(at 5L/min) / 0.35(at 5L/min Rated fiow (50/60Hz) 7 L/min 5 / 5 For option T15 / 5 Flowdisplay range21 L/min 2 to 16 Circulating fluid system Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM) Particle filter nominal filtration rating20 m 35 Bypass

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

IZx-OMT0049

160 to 400 160 to 640 5H / 5L 160 to 640 160 to 1300 5H / 5L 160 to 2500 160 to 2500 7H / 7L 160 to 640 160 to 1300 7H / 7L 160 to 1300 160 to 2500 7H / 7L 160 to 2500 160 to 2500 9H / 9L 160 to 820 160 to 1900 9H / 9L 160 to 1900 160 to 2500 9H / 9L 160 to 2500 160 to 2500 BH / BL 160 to 1600 160 to 2500 BH / BL 160 to 2500 160 to 2500 BH / BL 160 to 2500 160 to 2500 3-1-4.

Low Differential Pressure Sensor

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.

PSE550/300

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output M3 x 5L DC (+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 M3 x 5L DC () Blue 1 2.

2-Color Display High Precision

Option Nil M ZS-24-A ZS-24-B ZS-24-D ZS-35-C Fixed SI unit Note 2) Bracket A With 2 mounting screws of each M3 x 5L, M4 x 5L Bracket B With 2 mounting screws M4 x 5L With unit switching function Note 1) P (Initial value psi) Bracket D With 2 mounting screws of each M3 x 5L, M4 x 5L Panel mount adapter (Piping: For 01/N01) Panel mount adapter (Piping: For W1/WF1/M5/C4/C6) Panel mount adapter

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. M3 x 5L Bracket (Part no. ZS-28-B) M3 x 5L 2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Mounting Panel Caution Front protective cover (Part no.

ZQ-OM01301

5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEC EE FC FE EA EB FA FB *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 34 - Doc.

IIIIIII

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

Mechanical Valves Series NVM, NVFM, NVZNI

o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

ZSE30A(F)/ISE30A

One-touch fittings 6 mm straight One-touch fittings 1/4 inch straight One-touch fittings 4 mm elbow One-touch fittings 6 mm elbow One-touch fittings 1/4 inch elbow 4 cores, for 2 outputs, 2 m Mounting screw (with 2 pcs. of M3 x 5L) 3 cores, copy function, 1 m Mounting screw (with 2 pcs. of M3 x 5L) Copy function (up to 10 slaves) Mounting screw (with 2 pcs. of M3 x 5L) O-ring, one-touch clip

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

Table of Contents

Set of nos. above @2, @3, @4 8-29-6 7 Dual Rod Cylinder: Basic Type Series CXS Dimensions: 6 ZZ (58.5 + ST) ST SS (45 + ST) 16 8 5.5 Z (10 + 1/2 ST) 2-3.4 through 2-6.5 counterbore depth 3.3 M3 x 0.5 x 5l (Hexagon socket head set screw) 14 1 2.75 13 3 3 OUT 1 MX 5.6 3.2 MTS 0.2 28 0.2 22.7 (16) 37 35 16 28 MY 6.3 5 CY M2.5 x 0.45 x 6l 6 (Hexagon socket headcap screw) M3 x 0.5 x 12.5l, M3

High Vacuum L Type Valve

XLA16A-30-1-2M9NA-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, bellows assembly, and nut assembly. It does not contain external seal. Oerder separately if it is required. External seal, Valve seal 1, Valve seal 2 Description Part indication No.

XL-OMY0001

-1-2 XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 63 80 XLA63-30-1-2 XLA80-30-1-2 XLA63A-30-1-2 XLA80A-30-1-2 XLA63-30-1H-2 XLA80-30-1H-2 XLA63A-30-1H-2 XLA80A-30-1H-2 11,2 FKM:No.1349-80[ ]P8 XLA16A-30-1-2-XN1 2 M9// XLA16-30-1-2M9// 3 XLA16A-30-1-2M9NA-XN1