Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 1 pc, Valve Open, Voltage: 220 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

CATALOG

H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz

V

H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz

PAB-OM-O003

Discharge capability 1) Flow-rate characteristics PB1313A Flow-rate characteristics (5Hz) PB1313A5Hz 0.5 SUP=0.5MPa Discharge pressure (MPa) 0.4 SUP=0.4MPa MPa 0.3 SUP=0.3MPa 0.2 SUP=0.2MPa 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution -The above flow characteristic graph is for clean water (viscosity 1mPas, specific gravity 1.0).

Process Pump <Fluororesin Type> Series PA3000

Clean room Assembled and double-packaged in clean-room environment Note) With 3/8" inlet/outlet tube: 1 to 12l * The values appearing in the above table are representative of use in a room temperature environment and with tap water. 3 Series PA3000 Performance Automatically operated type Air pilot actuation type * Solenoid valve switching cycle PA3313-m03: Flow rate characteristics (5Hz

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9B--Solid State, Gen.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 1 pc, Valve Open, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard Indicator: -

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 1 pc, Valve Open, Voltage: 220 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard Indicator

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: M (M Type Plug Connector), Surge Suppressor: Z (w/Light &

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: M (M Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: S (w/Surge

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light &

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -, Non-standard Indicator:

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor, Non-standard

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: w/Surge Voltage Suppressor