IDX-OM-U021

0.151.0 / K 0.151.6 () 245 (85%) 50Hz 16 20.1 25 (ANR) 1) 60Hz 18.8 23.7 30 3/min m 50Hz 16.7 20.9 26 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 3) 10 (50/60Hz) kW 8.0/9.0 10.0/11.5 12.0/15.0 () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.9/3.5 4.0/4.7 4.0/4.8 (50/60Hz) (50/60Hz) A 10.5/11.5 15.4/15.6 15.7/16.0 5 ) A 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

IDX-OM-Z004

23.7 30 3/min 50Hz 16.7 20.9 26 m 2) 60Hz 19.6 24.7 31.2 MPa 0.7 40 32 10 3) 6) m 3/h 1.29 / 1.56 1.74 / 1.98 2.16 / 2.53 (50/60Hz) 32 7) MPa 0.070.1 (50/60Hz) 8) kW(RT) 9 (2) 11.5 (2.5) 14.5 (3.2) () AC200V(50Hz) / AC200,220V(60Hz) 4 ) kW 2.4 / 2.8 2.8 / 3.3 (50/60Hz) (50/60Hz) A 8.5 / 9.0 10.2 / 11.5 5 ) A 20 30 (30mA) R407C (HFC) () V JIS 65A 10K JIS 80A 10K R2 K 16K

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Series XLAV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLAV valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Table of Contents

Mounting of auto switches for cylinder Mounting of auto switch for table position detection Switch mounting screw (M2.5 x 4l) Flat head watchmakers screwdriver (Included) Switch mounting screw (M2.5 x 4l) (Included) Flat head watchmakers screwdriver Note) When fastening the auto switch mounting screw, use a watchmakers screwdriver with a grip diameter of 5 to 6 mm.

Table of Contents

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Table of Contents

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light M2.5 x 4l Slotted set screw Indicator

Auto Switch Guide

Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 OUT Black 68 68 63 5 Dimensions DC () Blue D-M9V D-M9 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV M2.5 x 4l Slotted set screw Indicator light Indicator