XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model For A side SY3000-37-80A-3 For 1 to 8 stations For B side SY3000-37-80A-6 SS5Y3-20SA For A side SY3000-37-80A-4 For 9 to 16 stations For B side SY3000-37-80A-7 For A side SY3000-37-80A-3 For 1 to 8 stations For B side SY3000-37-80A-6 SS5Y5-20SA For A side SY3000-37-80A-7 For 9 to 16 stations For B side SY3000-37-80A-9 For A side SY3000-37-80A-4 For 1 to 8 stations For B side SY3000-

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Model For A side SY3000-37-80A-3 For 1 to 8 stations For B side SY3000-37-80A-6 10-SS5Y3-20SA For A side SY3000-37-80A-4 For 9 to 16 stations For B side SY3000-37-80A-7 For A side SY3000-37-80A-3 For 1 to 8 stations For B side SY3000-37-80A-6 10-SS5Y5-20SA For A side SY3000-37-80A-7 For 9 to 16 stations For B side SY3000-37-80A-9 For A side SY3000-37-80A-4 For 1 to 8 stations For B side SY3000

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Model Interface For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side For A side For B side SY3000-37-80A-5 SY3000-37-80A-2 SY3000-37-80A-7 SY3000-37-80A-4 SY3000-37-80A-5 SY3000-37-80A-2 SY3000-37-80A-7 SY3000-37-80A-4 SY3000-37-80A-9 SY3000-37-80A-7 SY3000-37-80A-7 SY3000-37-80A-3 SY3000-

SYJ300-OMU0003

-5 A 18 21,32SA SS5YJ3SY3000-37-80A-2 B SY3000-37-80A-7 A 916 SY3000-37-80A-4 B SY3000-37-80A-5 A 18 SY3000-37-80A-2 B 20,40, 42,43SA SS5YJ5SY3000-37-80A-7 A 912 SY3000-37-80A-4 B SY3000-37-80A-9 A 1316 SY3000-37-80A-7 B SY3000-37-80A-7 A 18 SY3000-37-80A-3 B 21,41SA SS5YJ7SY3000-37-80A-10 A 912 SY3000-37-80A-6 B SY3000-37-80A-12 A 1316 SY3000-37-80A-9 B 1)Ass'y 2)

XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.59111 lb

Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. BONNEY ASSY XLA-63D-M9//. VACUUM SERIES. XLA NO SIZE RATING. 5.51155 lb. 21.

Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. XLA NO SIZE RATING. VACUUM SERIES. XLA NO SIZE RATING. 21.

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0242 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 6.94455 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 3.21874 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.87308 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.21082 lb

VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb

XLA NO SIZE RATING, .00000 lb

, 2X, XLA NO SIZE RATING, 1.69021 lb

, 2X, XLA NO SIZE RATING, 3.34476 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.45333 lb