Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

1

Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added! Sub-plate newly added!

Valve Type: Double Acting, O-ring Seal, Flange Size: 80, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XLA 80, R1 MATERIAL, HIGH VACUUM VALVE, L45, 11.40000 lb

VALVE SEAL, XLA 80, R1 MATERIAL, HIGH VACUUM VALVE, L45, 6.71000 lb

In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

for XLA

Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std.

; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XLA 80, Q1 MATERIAL, HIGH VACUUM VALVE, L45, 11.4 lb

VALVE SEAL, XLA 80, Q1 MATERIAL, HIGH VACUUM VALVE, L45, 6.71 lb

Flange Size: 80

Flange Size: 80, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.