Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

.: 1349-80), Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): 0.5

.: 1349-80), Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): 0.5

.: 1349-80), Body Surface Treatment: External: hard anodized aluminum, Internal: base material, Seal Change Location: None, Length of Lead Wire for Switch(m): 0.5

XLGR Series

Model XLGR-80*-1* XLGR-100*-1* XLGR-160*-1* Valve size 80 100 160 Main exhaust valve Double acting (pressurized to open / close) Actuating type Bypass valve Normal close (N.C.)

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: FKM, Same

Flange Size: 63, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: FKM, Same

1

Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added! Sub-plate newly added!

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XLA 80, Q1 MATERIAL, HIGH VACUUM VALVE, L45, 11.4 lb

VALVE SEAL, XLA 80, Q1 MATERIAL, HIGH VACUUM VALVE, L45, 6.71 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XLA 80, R1 MATERIAL, HIGH VACUUM VALVE, L45, 11.40000 lb

VALVE SEAL, XLA 80, R1 MATERIAL, HIGH VACUUM VALVE, L45, 6.71000 lb

In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA

)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA