Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right
) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XLA 80, Q1 MATERIAL, HIGH VACUUM VALVE, L45, 11.4 lb
VALVE SEAL, XLA 80, Q1 MATERIAL, HIGH VACUUM VALVE, L45, 6.71 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XLA 80, R1 MATERIAL, HIGH VACUUM VALVE, L45, 11.40000 lb
VALVE SEAL, XLA 80, R1 MATERIAL, HIGH VACUUM VALVE, L45, 6.71000 lb
In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std.
; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
Flange Size: 80, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.21082 lb