Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

(See Fig. 2.)

XL

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

High Vacuum Angle Valve

0.28 5 XLA-25-2 50 121 0.47 14 B XLA-40-2 65 171 1.1 45 XLA-50-2 70 185 1.8 80 XLA-63-2 88 212 3.1 160 A XLA-80-2 90 257 5.1 200 *1 The same for all series Minimal outgassing Low outgassing makes it possible to use a lower capacity pump and also shorten exhaust time.

High Vacuum Angle Valve, XL Series

Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11

XLA- ∗ -F7NJ ∗ - ∗ Series

) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200

XLA Series

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

High Vacuum L Type Valve

30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

Flange Size: 63, Flange Type: D [K(DN)]

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

XM, XY

9-1A AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

XLAQ/XLDQ

Note 2) Refer to Construction of each series for the construction numbers.

Table of Contents

2 2 2 2 4 2 2 1 1 6 2 No. !

Air Cylinder Series MB

2, 4, 6, 8) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) n (Same surface) 2 (Different surfaces, same surface) 20 25 25 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) D-A59W n (Same surface) 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 2 (Different surfaces, same surface) 15 25 25 15 + 55 (n 2) 2 (n = 2, 4

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 50 + 45 (n 2) 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 60 + 45 (n 2) 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

CV/MVGQ

2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 110