SY

Caution Interface Regulators Specifications ARBY3000--2 A1 B1 ARBY5000--P-2 ARBY5000--2 A1 B1 ARBY3000--P-2 Interface regulator model Applicable solenoid valve model Regulated port Regulating pressure range Maximum operating pressure Fluid Ambient and fluid temperature Pressure gauge port size A B SY3 1 40(R) SY 1 40(R) P A B P 0.1 to 0.7MPa 0.7MPa Air Maximum 50C M5 x 0.8 46g (with 05), 50g

RSH/RS1H

Indicator light Detection indication (Red LED) Set operation indication (Green LED) Lever detection switch 25 to 70C (No freezing) Ambient temperature Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G

Air Slide Table/Long Stroke Type Series MXY

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Caution Interface Regulators Specifications ARBY3000--P-2 ARBY3000--2 A1 B1 ARBY5000/7000--P-2 ARBY5000/70--2 A1 B1 Interface regulator model Applicable solenoid valve model Regulated port Regulating pressure range Maximum operating pressure Fluid Ambient and fluid temperature Pressure gauge port size A B SY3 1 40(R) SY 1 40(R) P A B P 0.1 to 0.7MPa 0.7MPa Air Maximum 50C M5 46g (with 05), 50g

Heavy Duty Stopper Cylinder Series RSH/RS1H

Indicator light Detection indication (Red LED) Set operation indication (Green LED) Lever detection switch 25 to 70C (No freezing) Ambient temperature Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G

RSH

Impact Endurance 500m/s (About 50G) XYZ direction 10 times Enclosure IEC standard IP67 (JEM standard IP67G Drip proof, Oil proof) Note 1) At load current 100mA and cord length 2m Note 2) Between case and whole charging part Dimensions E2E-X1C1 (RSH20/32) 25 17.5 8 15 * Indicator light * Polyvinyl chloride round cord (Oil and vibration proof) 0.14mm2 X 3 wire O.

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G), X,

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating ambient humidity 35 to 95% RH Note 1) Residual voltage 2V or less 3V or less Note 2) Withstand voltage 500VAC 1000VAC Vibration Endurance 10 to 55 Hz, Duplex amplitude 1.5mm X,Y,Z direction each 2h Impact Endurance 500m/s2 (approx. 50G), X,

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !