Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

rep-modular-e

AW30K/40K Note) The flow direction can be changed by taking off the check valve assembly, and replacing it with the square embedded gauge, pressure gauge adaptor assembly and plug assembly. 422 AW60(K) Exploded View 4 Mounting screws (4 pcs) Stem assembly (Convex) Actuators Modular F.R.L.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

AW30K/40K Note) The flow direction can be changed by taking off the check valve assembly, and replacing it with the square embedded gauge, pressure gauge adaptor assembly and plug assembly. 422 AW60(K) Exploded View 4 Mounting screws (4 pcs) Stem assembly (Convex) Actuators Modular F.R.L.

Modular Type Regulator Series AR

AR20K AR25K to 40K (-06) AR50K, 60K Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Aluminum die-cast Polyacetal 1 2 Replacement parts Part no. Material Description No.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

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iable x43O'X440 .ot avai able wirh AW10 and AW20 NoreJ AWl0 @mes wth a rrack llow medranEm 6 a sla.dad lealure f the set pressure E below o 15MPa back iow may nol occur When a back f,tu m6hmm is requred wrlh a set p$ure or e$ thm 0l5l Pa Optional specif ications NPT AW10 AW20 (K) to 40 Nole 1) Dra n glide s NPT 1i4 (appr @ble to AVJ3oK and 40K), an'i lhe exhaust portlofauto d@ n cmes w lh

Standard Combinations

ACG40D AWG40 AFM40 1/4, 3/8, 1/2 INDEX Air Combination Regulator with Built-in Pressure Gauge Air Filter + Regulator with Built-in Pressure Gauge + Lubricator Regulator with Built-in Pressure Gauge ACG20/30/40 P .4 ARG20/30/40 P .20 Filter Regulator with Built-in Pressure Gauge + Lubricator Regulator with Built-in Pressure Gauge with Back Flow Mechanism ACG20A/30A/40A P .7 ARG20K/30K/40K

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Bore size (mm) 23 25 26 27 28 Retaining plate gasket Wiper ring Rod seal Piston seal Valve seal Tube gasket NLP-125A CS1Q125A-PS SFR-36K 125 P7 C120 G55 PNY-36 NLP-140A CS1Q140A-PS SFR-36K 140 P7 C135 G55 PNY-36 NLP-160A CS1Q160A-PS SFR-40K 160 P7 C155 G55 PNY-40 6-9-6 7 Air Cylinder: With Auto Switch Double Acting, Single Rod Series CDS1 125, 140, 160, 180, 200 How to Order CJ1 CDS1 L 300

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200