Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 3-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 40, Seal Type: Bellows Seal, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60℃ (

Compact Vacuum Unit Ejector/ Vacuum Pump System

the lead wire assembly with connector) Manifold Base Stations 1 2 3 4 5 6 7 8 9 10 11 12 Weight g 16 22 28 34 41 47 53 60 66 72 79 85 Calculation Formula for Weight of the Manifold Type (Weight of the single unit x Number of stations) + (Weight of pressure sensor or vacuum pressure switch x Number of stations) + Manifold base Calculation example: With pressure sensor, 5-station manifold 40g

Proposals for Energy Saving

500VDC) between external terminals and case 10 to 500Hz at whichever is smaller, amplitude 1.5mm or acceleration 98m/s(10G), in X, Y, Z directions for 2hrs. each 980m/s in X,Y,Z directions 3 times each Connector type Grommet type Heat resistant vinyl cord 1.55, 0.31mm,4 wire Oil resistant vinyl heavy duty cord -21, -23: 3.5, 0.14mm,4 cores -22, -24: 3.5, 0.15mm, 5 cores Lead wire Weight 40g

VM

Frequency Port size (Nominal size) Piston style 0.15 to 1.0MPa 5 to 60C (No freezing) VM/VR Red Green Orange Rc(PT) (6A) 40g VH 300 c.p.m or less R(PT) (6A) 1 8 1 8 Weight 6g Construction/Component Parts Construction/Component Parts w q Description Aluminum alloy Material Notes No. w q Description Brass Material Notes No.

ZB-OM00301

// PV=PD ZB11-K1PVPD ZB0020-K1/ PV ZB11-J1PV ZB0010-J1/ PVPD ZB21-Q1L(O)-P PVPD ZB0020-K1L(O)-P 1 3 1 3 35 - No.ZB-OM00301 // PV=PD ZZBZB31-K1D U / PVPD ZZB-SM5 ZB31-Q1L(O)E F D U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22 28 34 41 47 53 60 66 72 79 85 ++ 5 40g

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: FKM, Same Specs as Standard FKM, Seal Replacement

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric