Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 25, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 40, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 63, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 80, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 25, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 80, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Smooth Vent Valve

Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard