XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.
This is a legacy product, and replaced byXLA-40-2M9//, HIGH VACUUM VALVE, MAG NO SW, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.88371 lb
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLA-40, VACUUM SERIES, XLA NO SIZE RATING, .01980 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL (XLA-40), VACUUM SERIES, XLA NO SIZE RATING, .01980 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL FOR XLA-40, VACUUM SERIES, XLA NO SIZE RATING, .01980 lb
VM SUP blocking disk assembly SY30M-40-2A SY50M-40-1A SY70M-40-1A EXH blocking disk assembly Series SY3000 SY5000 SY7000 SY30M-40-1A SY50M-40-1A SY70M-40-1A XT34 Label for blocking disk If the blocking disk assembly is ordered using the manifold specification sheet and ordered at the same time as the manifold, the position where the blocking disk assembly is inserted will be labeled and
XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right
Left flange surface Rear flange surface Right flange surface Right flange surface Left flange surface With indicator E H V I G L H A V V M A U C U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-40, VACUUM SERIES, XLA NO SIZE RATING, .34393 lb
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-40, VACUUM SERIES, XLA NO SIZE RATING, .34393 lb
Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-40, VACUUM SERIES, XLA NO SIZE RATING, .34393 lb
XLA-40 SPECIAL KIT, HIGH VACUUM VALVE
Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.
Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.
Anodized, Seal Material: N1 [EPDM (2101-80)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA
Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.
; Internal - Raw Material, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly & O-ring for Fixing, Flange Size Specification: Required for XLA