Size, Body, Valve Type: 25M (Size: 2; Body Mat'l: Stainless Steel; Port Size: 3/8; Orifice Dia: 7, N.C.), Voltage and Electrical Entry: Z (Other Voltages and Electrical Options), Other Voltages and Electrical Options: 2S ( 240VAC; Conduit Terminal w/Surge Voltage Suppressor & Light), Other Options: E (Oil-free, NPT Thread)
Size, Body, Valve Type: 25M (Size: 2; Body Mat'l: Stainless Steel; Port Size: 3/8; Orifice Dia: 7, N.C.), Voltage and Electrical Entry: B (100VAC; Grommet w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)
Size, Body, Valve Type: 25M (Size: 2; Body Mat'l: Stainless Steel; Port Size: 3/8; Orifice Dia: 7, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: A (G Thread)
Size, Body, Valve Type: 25M (Size: 2; Body Mat'l: Stainless Steel; Port Size: 3/8; Orifice Dia: 7, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread)
Size, Body, Valve Type: 25M (Size: 2; Body Mat'l: Stainless Steel; Port Size: 3/8; Orifice Dia: 7, N.C.), Voltage and Electrical Entry: G (24VDC; DIN Terminal w/Surge Voltage Suppressor), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Mounting: XC (Special Entry Direction), Electrical Entry Direction: C (270°)
Size, Body, Valve Type: 25M (Size: 2; Body Mat'l: Stainless Steel; Port Size: 3/8; Orifice Dia: 7, N.C.), Voltage and Electrical Entry: A (24VDC; Grommet), Other Voltages and Electrical Options: None, Other Options: B (NPT Thread), Mounting: XB (w/Bracket)
XLAQ/XLDQ Note 2) Refer to Construction of each series for the construction numbers.
2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).
Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0198 lb
Flange Size: 25, Flange Type: KF(NW), Port Direction: M (w/o Indicator, Right Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)
Flange Size: 25, Flange Type: KF(NW), Port Direction: M (w/o Indicator, Right Flange Surface), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Right Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Right Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator:
VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb
XLA NO SIZE RATING, .00000 lb
This is a legacy product, and replaced byXLA-50GH4-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING
This is a legacy product, and replaced byXLA-50H5-2, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.25529 lb