KJ

KK2P-23L -04L -06L KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK2S-23L -04L -06L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Body size Applicable tubing O.D. mm Part no.

Table of Contents

KK2P-23L -04L -06L KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK2S-23L -04L -06L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Body size Applicable tubing O.D. mm Part no.

S Couplers Series KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

S Couplers Series KK/KKH/KK13

KK2P-23L -04L -06L KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK2S-23L -04L -06L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Body size Applicable tubing O.D. mm Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Round head Phillips screw (M3 x 0.5 x 16l springwasher 2 pcs.)

MG

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Use mounting screws (M3 x 16L) or DIN rail (35 mm width). (DIN rail part no.: ISA-2-1 to 7) Adjust offset before mounting of the amplifier unit. Removal To remove from the DIN rail, push the amplifier body upward and then pull it horizontally to release from the claw 1 side. 1. Mounting with screws Tighten two M3 x 16L mounting screws at a tightening torque of 0.5 to 0.7 Nm.

Made to Order

NDH10 NZ H R L1 Z ZZ Bore size (mm) Spring pin +0.058 0 +0.058 0 +0.058 0 +0.070 0 20 9 36 18 41 10 61 146 3 x 16L 25 9 38 18 45 10 65 150 3 x 16L 32 9 38 18 45 10 65 152 3 x 16L 40 12 55 38 50 13 83 200 4 x 24L CA2 series CV series H Hole: NDH10 Shaft: NDd9 NZ NX PX Spring pin L1 PY RR1 ZZ + Stroke (mm) d9 NX H PX ND L1 PY NZ ZZ H10 RR1 Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070

1

H L1 NDH10 NZ R Z ZZ Bore size (mm) Spring pin Data +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 x 16l 20 9 41 18 36 10 61 146 3 x 16l 25 9 45 18 38 10 65 150 3 x 16l 32 9 45 38 18 10 65 152 4 x 24l 40 12 50 38 55 13 83 200 Series CA2 (CBA2, CV3, CVS1) Hole: NDH10 Shaft: NDd9 Spring pin ZZ + Stroke H10 d9 NZ ND L1 RR1 H ZZ PY PX NX Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

4-M5 x 0.8 thread depth 4.5 4-Rc 1/8 thread depth 6.5 4-Rc 1/8 thread depth 6.5 8-M4 x 0.7 thread depth 5.5 8-M5 x 0.8 thread depth 7.5 8-M5 x 0.8 thread depth 7.5 2-M6 x 1.0 thread depth 10 2-M8 x 1.25 thread depth 12 2-M8 x 1.25 thread depth 12 M6 x 1.0 x 12l M8 x 1.25 x 6l CXS20 8 7.75 9.5 6.5 12.5 M6 x 1.0 45 M6 x 1.0 x 14l M8 x 1.25 x 6l CXS25 8.5 13 9 9 15 M6 x 1.0 46 M8 x 1.25 x 16l

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.

HRX-OM-X071

Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid*3 Tap water, 15% ethylene glycol aqueous solution Operating temperature range1 5 to 35 Cooling capacity (50/60Hz) 4 W 4600/ 5100 4800/ 5800 Heating capacity (50/60Hz) 5 W 1000/ 1200 1100/ 1200 Temperature stability 6 0.1 7 MPa 0.34(at 15L/min)/ 0.34(at 23L/min) Pump capacity (50/60Hz) Pump capacity of option T1 7 MPa 0.35(at 16L

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

MHC2

MHC2-16l Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. When auto switch is used, through hole mounting type is not available.