Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 3-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 16, Seal Type: Bellows Seal, Indicator: With indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60℃ (

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Open, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: FKM, Same Specs as Standard FKM, Seal Replacement: 2-3-4, X152

AC

control 0.05 to supply pressure Bracket Pressure gauge Silencer M5 to 2 1.15-1 E-P HYREG Series VY1 0.05 to 0.57 Pressure gauge 1.15-18 3/8 , 1/2 Cylinder acceleration/ deceleration control Applied pressure control 4 port E-P HYREG Series VY3 0.2 to 0.7 Auto balancing 1.15-29 1/4 Balance controller VY511, VYU5 1.5-2 Miniature Regulator ARJ1020F Standard Specifications Compact and lightweight (16g

ARJ1020F

Miniature Regulator ARJ1020F Standard Specifications Compact and lightweight (16g) Low cracking pressure 0.02MPa Standard model equipped with backflow function ARJ1020F Model M5 (Male thread) IN side Port size 6 4 OUT side (Applicable tube O.D.)

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI PT M5X6MM TUBE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03847 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03584 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI PT M5X4MM TUBE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03481 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINI, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .04202 lb

Options include bracket, pressure gauge, and manifold base (depending on model).Miniature regulator, ARJ1020, Compact and lightweight (16g), Low cracking pressure 0.02MPa, Standard model equipped with backflow function, Standard with built-in One-touch fittings, REGULATOR, MINIATURE, AIRLINE EQUIPMENT, ARJ MINATURE REGULATOR, AA, ARJ M5 MODULAR (PT), .03567 lb

FGX-OM-R008

30 65 130 200 Filtration Note 3) 0.01m (Filtration efficiency 99.99%) Noise level Note 3) 30dB(A) Operating temperature 5 to 45oC Maximum operating pressure Note 4) 0.1MPa Body PBT, Polyolefin, Polyurethane PP*, stainless steel*, EPDM (with fluorine coating)* Material Note 5) Gasket NBR, Stainless steel Male thread type 1 7 12 17 Plug-in type 3 6 11 16 Mass (g) One-touch fitting 5.5g 8g 16g

Miniature regulator, ARJ1020; Compact and lightweight (16g); Low cracking pressure 0.02MPa; Standard model equipped with backflow function; Standard with built-in One-touch fittings

Miniature regulator, ARJ1020; Compact and lightweight (16g); Low cracking pressure 0.02MPa; Standard model equipped with backflow function; Standard with built-in One-touch fittings

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79