Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: 2 (Refresh)

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Open, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Open, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 3-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 16, Seal Type: Bellows Seal, Indicator: With indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60℃ (no heater

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

XLAQ/XLDQ

0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.