1

16 32 32 PROFINET M12 M12 16 16 PROFIBUS DP 32 32 EtherNet/IP M12 D-sub Note) 16 16 32 CC-Link M12 16 Note) Enclosure is IP40 when the communication connector is D-sub. eClamp bracket assembly Part no.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Flange Size: 16

Flange Size: 16, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 1.59111 lb

Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. BONNEY ASSY XLA-63D-M9//. VACUUM SERIES. XLA NO SIZE RATING. 5.51155 lb. 21.

Please contact us for the latest version.sales@ocaire.com XLA HIGH VACUUM VALVE. XLA NO SIZE RATING. VACUUM SERIES. XLA NO SIZE RATING. 21.

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 21, XLA NO SIZE RATING, 0.0242 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 6.94455 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 3.21874 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.87308 lb

Please contact us for the latest version.sales@ocaire.com, XLA NO SIZE RATING, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.21082 lb

VACUUM VALVE, 21, XLA NO SIZE RATING, .00000 lb

XLA NO SIZE RATING, .00000 lb