Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

4 6 P NC 21 25 TB 16 20 UA M8 x 1.25 UB 16 20 8H9 10H9 VA Model MHSL3-100D MHSL3-125D Rc 1/4 (G 1/4, NPT 1/4) Rc 3/8 (G 3/8, NPT 3/8) +0.036 0 +0.036 0 0 -0.043 0 -0.052 +0.036 0 +0.036 0 8H9 18h9 10H9 22h9 M10 x 1.5 M10 x 1.5 XA XB 6 8 VB 6 8 WA WB 4 6 Model MHSL3-100D MHSL3-125D +0.036 0 +0.036 0 +0.087 0 +0.100 0 8H9 102H9 10H9 130H9 594 Series MHSL3 Parallel Style Air Gripper/3-Finger

Table of Contents

SB, counterbore depth SC P .C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) I G 63 84 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 M 4 6 B 134 166 K 15 21 AC 6 8 J 38 52 AA 96 122 AB 90 114 NA 34 40 L +0.036 0 +0.036 0 NB Model MHS3-100D MHS3-125D CB 30.6

Compact Hydraulic Cylinder

(Example) CHDQB50-100D Applicable Auto Switches: Refer to pages 347 to 406 for further details on each auto switch.

Compact Hydraulic Cylinder

(Example) CHDQB50-100D Applicable Auto Switches/Refer to pages 431 to 490 for further details on each auto switch.

CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B'

Compact Cylinder with Lock Series CLQ

-100D -100D x 175 L x 190 L x 215 L 175 190 215 819 Series CLQ Construction: 20 to 32 i o !

Compact Cylinder

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D

Compact Cylinder with Lock Series CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B

CLQ

75D x 165l x 190l -100D -100D -100D x 190l x 215l 9-10-11 11 Series CLQ Construction: 20 to 32 i o !

Hydraulic

(M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l CHQB100 10D

NCQ2/CQ2

60 65 6.5 14.5 9 80 85 5 125 150 CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D 35 40 45 50 55 60 65 70 75 80 65 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L 15 7.5 85 90 7.5 -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D x 140L CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D 45 50 55 60 65 70 75

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

EXxx-OMK0006

Error Control Services are not set on shipment. (100C, 100D, 1016, 1017h = 0) Node Guarding Protocol and Heartbeat Protocol are not able to be used at the same time. If both Node Guarding Protocol and Heartbeat Protocol are set at the same time, the Heartbeat Protocol is used.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

CHQWB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) 100D (M) 75D (M) 100D (M) CH QWB50 10D (M) 15D (M) 20D (M) 25D (M) 30D (M) 35D (M) 12 40D (M) 45D (M) 50D (M) 75D (M) 100D (M) 38 Series CHQWB Construction CHQWB20 Rod end male thread CHQWB32 to CHQWB100 Rod end male thread

XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.