Part Number Description: HIGH VACUUM GATE VALVE Product Line: Z Product Line Description: VACUUM SERIES Click here to report information errorImage shown may not match exact part number
XG_-OMV0028 XGT312-50336-** ASSY XGT300-1-1AS XGT313-50336-** ASSY XGT300-1-1-3AS XGT311-50336A1-1 XGT31*-50336-* A XGT311-50336A1-1A XGT31*-50336-*A A ASSY XGT311-50336A1-1C XGT31*-50336-*C A XGT311-50336A1-1F XGT31*-50336-*F A ASSY XGT300-2-1S O FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGT31*-50336-1* AS568-271 O Kalrez R 4079 XGT300-9-11S XGT31*-50336-2* AS568-271 O (FKM) XGT300-9-7S AS568-177
For 200 mm wafer For 300 mm wafer 529 XGT Series Specifications XGT22-32 XGT22-46236 XGT31-50336 Model Wafer size (mm) 200 300 Opening window size (Height x Width) (mm) 32 x 222 46 x 236 50 x 336 Number of axes 1 2 Atmospheric pressure to10 6 Operating environmental pressure Note 1) (Pa) (abs) Operating pressure differential (kPa) 4 or less Operating pressure range (MPa) (G) 0.45 to 0.6 6.5
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
No Note XGTP31 -50336-1 or XGTP311-50336A1-1 XGTP31-50336-2 Bonnet ASSY XGTP311-50336A1-1A XGTP31 -50336A XGTP311-50336A1-1C XGTP31 -50336C XGTP311-50336A1-1F XGTP31 -50336F Gate ASSY XGTP300-2-1S XGTP31 -50336Bellows ASSY XGTP300-20AS O-ring(Body opening side) FKM XGT300-9-10S AS568-273 FKM XGT300-9-9S XGTP31 -50336-1 O-ring(Gate) AS568-271 Kalrez R4079 XGT300-9-11S XGTP31 -50336-2
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
Part Number Description: ACTUATOR-XGT312-47336-2C1-X316 Product Line: Z Product Line Description: VACUUM SERIES Click here to report information errorImage shown may not match exact part number
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)