2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

E M H B Model L2 L1 E L2 LQ3E2A-S LQ3E3A-S LQ3E4A-S LQ3E5A-S LQ3E6A-S LQ3E7A-S 1/4" 3/8" 1/2" 3/4" 1" 1 1/4" 4 5 6 7 8 9 6 9 10 14 18 22 17 22.5 24.5 26.5 30 35 16 19.5 22.5 24 26 35 16 21 24 32 41 50 34.5 47.5 52.5 64 78 92.5 33.5 44.5 50.5 61.5 74 92.5 39.5 49.5 54.5 66 80 97.5 38.5 46.5 52.5 63.5 76 97.5 20 25 29 37 49 64 M H Class 7 342 Series LQ3 Space Saving Branch Tee How to Order

One-touch Fittings

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

Refrigerated Air Dryers

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) The combination of K, L and M is not possible because an auto drain can only be attached to a single option. *2 The maximum operating pressure is 1.6 MPa. *3 Voltage symbol 20 (200 VAC) is the terminal block connection as standard. The Option S cannot be chosen.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

Refrigerated Air Dryers Series IDF/IDU

IDF125F-W/150F-W: Water-cooled type T A B 4 x Eyebolt I.D. 25 G S Facility water outlet R3/4 (When symbol-W4 is specified.) Terminal block for power supply Ball valve Facility water outlet R3/4 (When symbol-W5 is specified.) Terminal block for signal F C Q R Y-shaped strainer 3/4 (Accessory) Drain tube Facility water inlet Facility water inlet L R3/4 (When symbol-W4 is specified.)

XM, XY

Part numbers indicating changed seal material and leakage Changed part Note 2) Leakage (Pam3/s or less) Note 1) Symbol Nil N1 Symbol 1349-80 2101-80 Internal External FKM EPDM Barrel Perfluoro w, e, r, t w, r, t e 1.3 x 10-10 (FKM) 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310

Vacuum Module Series ZX

Unit for replacement S 0.3 to 0.7 mm B 0.5 to 1.2 mm Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Release flow rate adjusting needle Nil L Without lock nut With lock nut DC: 1 W (With indicator light: 1.05 W) AC DC: 0.45 W (With indicator light: 0.5 W) Nil (3) Vacuum switch unit PV port size 15 C 0X ZSE2 D Y M5 x 0.8 M6 x 1 (Option) Nil Y

VQZ1000/2000/3000

AC (1) Yes (W/o indicator light) Yes (W/o indicator light) (3) Nil Standard (1) (1) High pressure (Metal seal only) Note 1) Applicable to VQZ2000 and 3000.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W S Model LVA2 LVA3 LVA4 LVA5 LVA6 Model LVA20 LVA30 LVA40 LVA50 LVA60 11.5 70.5 24 92.5 A B A B 29 110.5 SMC SMC 34.5 147 36 156 Dimensions (mm) A B C E D G H J K L M N R U P Q Model Rc 1/4 NPT 1/4 LVA2 30 36 61 44 14.5 35 13 4 20 37 3.5 30 M5 x 0.8 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3 36 47 81.5 56 19 45.5 17.5 7.5 34 46 5.5 41.5 Rc 1/2 NPT 1/2 LVA4 46 60

LVQ

), (4) Rc 1/8 (NPT 1/8) Pilot port A B SMC A B SMC LVQ S-S Dimensions (N.O. valve, double acting valve) 2 1 (mm) A B C D E F G H J K L M N P Q R W Model LVQ2 S-S07 LVQ3 S-S11 LVQ4 S-S13 LVQ5 S-S19 LVQ6 S-S25 2 1 25.5 46 31.5 58 33.6 81 12 92 21.8 37 5 7 15 31.3 21 25.3 64 2 1 23.5 47 29.5 59 45.4 99 16.5 112 32 50 6 7 20 37.2 25 31.2 82 2 1 23.5 47 29.5 59 45.4 104.5 22 126 37.5 55.5 6 7

155

/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1 A L1 Reference dimension of "R" thread after installation.

Large Size Vacuum Module: Series ZR

AC voltage: S is not available for AC.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. Connection threads NPT Model L H A M W E Applicable tubing O.D.

High Purity Fluoropolymer

Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?