Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Cylinder

Bore6:CO.5 ~ .+~ MM 4>1O, 1S:Cl n\ ~I +I." ~\ 10>1 f!-f.F F ", "I , H I' f.'5., I1tJ F E Rod end without ~ H S R thread , I Z oG H K l MM 1 s I z..q sst I lost IS" , 5" 16!J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-75 2 How to Order AS 2 2 1 1 F

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

How to Order Elbow type AS 2 2 1 1 F 0106 ST Tamper proof Speed Controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1. Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

VZM400

External pilot type VZM451 type With foot bracket VZM450-01--F 2-4.5 mounting hole (External pilot port) 5-6-40

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Bit BYTE 64 (Maximum) Value The Bits 49 54 56 32 30 35 30 2D 49 4C 33 30 2D 31 2D 4B 2D 58 33 39 39 (hexadecimal number) indicate "ITV2050-IL30-1-K-X399."

PFxx-OMA1007

to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".

Common Supply Regulator

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

IO-Link/ELECTRO-PNEUMATIC REGULATOR

(displayed alternately) (3) To "F01" by using the and keys. (4) Press S-key. (5) Set the GAIN by using the and keys. (blink and change the rightest digit) (displayed alternately) (6) Press S-key. (7) Press S-key for 2 seconds or more, then go out from detail setting mode.

Body Option: 0 (Standard), Thread: F (PF), Style: 33 [Push Button (Flat Head)]

Pipe Port Type: G, Rod Arm Type: -, Mounting Method: Side, Plunger Type: -, Body Shape: Block Vertical Type, Number of Ports: 5-Port, Push Button Type: Flat Top, Plumbing Type & Direction: Direct Side, Number of Switching Positions: 2-Position Direction Switching, Switching Operation: Push Button, Nominal Designation of Piping Thread: 1/8, Valve Flow Coefficient (Cv)(mm2): 10.71, Body options

Ozone Resistant

220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves

EXxx-OMW0014CN

EX245-SPN1A SI FO LED 02dB FO LED 0dB (6.4.5 FO LED) (F01 EX245-SPN1A FO1: ON FO2: OFF 1 2 11 2 3SI EX245-SPN1A 34 No.EX-OMW0014CN-A 6. SI 6.1.

EXxx-OMU0020CN

Sync Master IRT PropertiesSynhronizationSynchronization role ValueSync master . 4-16 RT RT classValueRT:IRT IRT optionValueHigh performanceHigh flexibility IRT . 4-17 IRT option 33 No.EX-OMU0020CN 4.3.5.5.2.

Valve: ZS-33-M)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)