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.1 Parameter combination error for driver communication on slave DB Parameter setting 3D error for driver 3D.2 Parameter combination error for communication driver communication on master DB 3E Operation mode 3E.1 Operation mode error DB error 3E.6 Operation mode switch error DB 1 0 0 0 42.1 Servo control error by position deviation EDB (Note 4) 42.2 Servo control error by speed deviation

Pressure gauge or pressure transducer Temparature Differential pressure gauge or differential pressure transducer gauge g d1 Pressure control d33d1 equipment Flow control 3 valve d2 Air Filter Shut-off Flow meter 10d3 10d1 0d2 3d 3d 3 1 3d 3d 3 2 supply valve Thermometric pipe Test equipment Upstream pressure Downstream pressure measuring tube measuring tube Figure 2 Test circuit of ISO6358

Model Model MRHQ10 MRHQ10D P407090-3D P407090-1 Switch holder B MRHQ MRHQ16 MRHQ10S P407090-3S MRHQ20 MRHQ10C P407090-3C P407060-1 MA Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S DMRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D MRHQ25S P408080-3S Each unit includes two of each of the parts indicated left.

Detail name power reset (Note 2, 3) 39.1 Program error DB Alarm 39.2 Instruction argument external error DB 39 Program error 39.3 Register No. error DB 39.4 Non-correspondence instruction error DB 3A Inrush current suppression circuit error 3A.1 Inrush current suppression circuit error EDB 3D.1 Parameter combination error for driver communication on slave DB 3D Parameter setting error for

P407090-1 P406090-3D MRHQ10D Switch holder B P406090-3S MRHQ10S P407060-1 P406090-3C MRHQ10C Switch case P406060-3D MRHQ16D P406060-3S MRHQ16S P406060-3C MRHQ16C P407080-3D MRHQ20D P407080-3S MRHQ20S Switch holder A P407080-3C MRHQ20C P408080-3D MRHQ25D Two of each part indicated at the left are included in a unit. Switches are not included with a unit.

Take proper measures to prevent dust or foreign matter from accumulating in this area. (6) (3e) VQZ (3d) (3d) (3c) VZ (3) (9) (3a) VS (3e) (8) Electrical Connection VFN (9) For wiring to DIN terminal, connect the positive (+) polar side with connector terminal no. 1 and the negative () side with connector terminal no. 2 when the rated voltage is DC type. (3e) Magnifying figure (2a) Self-up

VZS VFS VS4 VQ7 EVS (1) VFN (4) (7) (5) (6) (3e) (3d) (3d) (3c) (3) (9) (3a) (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) DlN Terminal (Connection) Solenoid is wired with male thread terminals of DIN connector as follows. Connect with corresponding terminals of the connector.

VZS VFS VS4 VQ7 EVS (1) VFN (4) (7) (5) (6) (3e) (3d) (3d) (3c) (3) (9) (3a) (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) DlN Terminal (Connection) Solenoid is wired with male thread terminals of DIN connector as follows. Connect with corresponding terminals of the connector.

EEP-ROM 12 10 4. 3D No.PD16PD17 8 11 8 (2) 45 1. 55 0 55 2. ( 2.1) 3. 4. 5. 46 1. 40 0 40 2. 1. 2. 3. 3. 47 1. (2.6) 2. 3. 8 12 8 (2) 50 1 1. 1. 2. 3. 4. 5. 1 2. 2(51) 1. 2. 3. 1 3. 1. 12 2. 3. 4. 4. OFF 8 13 8 (2) 51 2 1. 2. 1. 2. 3. 4. 3. 1. 2. 3. 4. UVW UVW 5.

Positioning by external input command 39 EX_POSING 8.14.14 Servo Commands ZRET Zero point return command 3A Performs zero point return. 8.14.15 3C VELCTRL Velocity control command Controls speed. 8.14.16 3D TRQCTRL Torque control command Controls torque. 8.14.17 SVPRM_RD Read servo parameter command 40 Reads the specified servo parameter. 8.14.18 SVPRM_WR Write servo parameter command 41

Take proper measures to prevent dust or foreign matter from accumulating in this area. (1) 3e 3e (4) (7) 3e (5) (6) (3e) (3d) (3d) (3c) How to Calculate the Flow Rate For obtaining the flow rate, refer to front matter. (3) 3e (9) (3a) 3d (3e) (8) (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) Connector for DIN Terminal Description DIN connector Part no. GDM2C 1454 A

In that case, loosen the screw with washer (3e) and place a lead wire (3d) into the bracket, and then tighten it once again. b Maximum size of crimped terminal (9) is up to 1.25 mm2 3.5 when O terminal.

Exploded view (1) (4) (7) (5) (6) (3d)(3b) (3c) (3) (9) (3a) (3e) i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (9) (3e) Magnifying figure (2a) Self-up screw 2 1 3 (2b) Comparison between the Product Model No. and the Coil Part No. Product model no.

Preview and download 2D & 3D CAD Models online with real-time updating. Save Parts into a custom Parts List. E-Mail Parts Lists to internal groups (purchasing, maintenance) or external (partner companies, SMC sales representative). www.smcetech.com Product Selection Part Number Validation Use Pull-Downs to make selections and build the part number.

10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D

10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D

line Dryer The malfunction of air bearings of 3D measurement device, etc. 3 IDFB Series Model Selection Air dryers should be selected based on the corrected air flow capacity while taking operating environment and facility into account.

240 V . 199 256 % 16 31 % 48 .5 13 23 60 182 0 lt1: o:~9 28 110 90 148 58 191 248 52 11 .2 66 StroKe 230 295 37 'h 55 15 23 70 208 0 <:::0 0 '073 34 1 . 14 40 h 56.5 15 25 80 226 0 25 g:r n 40 140 110 192 71 221 286 65 12 .5 80 ~ 80 162 130 214 72 235 306 65 14 .0 81 244 315 100 17 Series eLA Auto Switch Standard Specifications Reed Lead wire Oil proof vinyl , Impact resistance 300mIS (3D

voltage suppressor) 24 VAC 12 VDC 12 VDC 24 VDC Electrical option Other option Faston terminal 100 VAC 110 VAC 200 VAC 230 VAC DIN terminal (With surge voltage suppressor) 48 VAC 2G 2H 2V 2J 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 2K 2L 100 VAC 110 VAC 200 VAC 230 VAC 2M 2N 2P 2Q 2R 2S Conduit terminal (With surge voltage suppressor) 48 VAC 220 VAC 240 VAC 2W 24 VAC 12 VDC 24 VDC 2T 3A 3B 3C 3D

;git) (3d;git) (3dlgit) (3digit) Fluid Air,noncorrosive gas +3% F.