Compatible Fluid: Vacuum, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 3/8, Operating Temperature Range(°C): -5～40, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.1, Orifice Diameter(Ø): 10, Sealing

Compatible Fluid: Vacuum, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Operating Temperature Range(°C): -5～40, Driving Type: Linear Motion Type, Operating Pressure Difference Range(MPa): null～0.1, Orifice Diameter(Ø): 10, Sealing

ZP

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

ZP

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

2

Standard Specifications Model AC20B-B AC25B-B AC30B-B AC40B-B AC40B-06-B AC50B-B AC55B-B AC60B-B Component Air Filter [AF] AF20-A AF30-A AF30-A AF40-A AF40-06-A AF50-A AF60-A AF60-A Regulator [AR] AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR50-B AR60-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 Pressure gauge port size [AR] Note 1) 1/8 Fluid Air Ambient and fluid

CATALOG

P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !

ZP

M6 x 1 A8 M8 x 1 G J J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

ZP

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Table of Contents

(mm) Model D1 Weight (g) 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 D2 L1 L2 L3 P A Q1 Q2 M1 M2 Port B Min. port size H a b (Width across flats) 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 68 71.5 73.5 13 14 17 18 13 10.4 38.2 16 9.9 17 64 65.5 67.5 H D 8 4 KM14-04-08-01S-3 30 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 38 6 KM14-04-08-02S-3 15.2 10.4 KM14

AC

gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Table of Contents

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

Table of Contents

Port size B Center of F .R.L. body D A (mm) Note) Applicable model D 14 B 14 A 10 Model E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 AC10, AW10, AF10, AR10, AL10 AC20 AF20, AR20, AW20 AL20, AFM20, AFD20, AWM20, AWD20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

KJ

(mm) Model D1 Weight (g) 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 D2 L1 L2 L3 P A Q1 Q2 M1 M2 Port B Min. port size H a b (Width across flats) 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 68 71.5 73.5 13 14 17 18 13 10.4 38.2 16 9.9 17 64 65.5 67.5 H D 8 4 KM14-04-08-01S-3 30 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 38 6 KM14-04-08-02S-3 15.2 10.4 KM14

Table of Contents

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

ZP3

(Trivalent chromated) M6 x 0.75 M12 x 1 Steel (Zinc chromated) M10 x 1 5 Fitting 6 Cassette Vacuum inlet direction Lateral Y Type/ZP3-Y ZP3-Y-B-B ZP3-Y-B-(02/04/06) w e Vacuum inlet Vacuum inlet q Component Parts ZP3-Y-B-(U2/U4/U6) No.

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.