BP1000

100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa V3 L 1 H 2 4 10 40 V3 L 1 H 2 4 10 40 00-83023 00-83026 00-83021 00-83000116 00-83020 00-8307 00-83022 00-83024 00-83000304 00-83000305 00-83000300 00-83000297 00-83000299 00-83000301 00-83000302

BP1000

100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa V3 L 1 H 2 4 10 40 V3 L 1 H 2 4 10 40 00-83023 00-83026 00-83021 00-83000116 00-83020 00-8307 00-83022 00-83024 00-83000304 00-83000305 00-83000300 00-83000297 00-83000299 00-83000301 00-83000302

VM

1 NBR 5-6-9 Series VM1000 Series VM1000/Side Ported Basic VM1000-4N-00 VM1000-4NU-00 VM1100-4N-00 VM1100-4NU-00 JIS Symbol/2 port 3 port 0.5 MPa supply Applicable tubing T0425 TU0425, T0403, TS0425 VM1100-4N-00 VM1000-4N-00 Side ported 3 port 2 port VM1100-4NU-00 VM1000-4NU-00 4.8 mm [2.5 mm] 2.3 mm [0.5 mm] 2.5 mm [2.0 mm] 6 N F.O.F. Applicable tube Mounting hole T.T. O.T.

One-touch Fittings Series KQ2

Mounting hole Nylon Urethane T (M) M L 3.2 4 KQ2E23-00 KQ2E04-00 M12 1 M12 1 26 26 15.5 16 6 8 10 12 16 13 13 2.9 5.6 31.5 32.5 3.4 5.6 14 14 17 KQ2E06-00 34.5 13.1 26.1 13.1 18.0 33 15 17 18.5 21 22 25 M14 1 M16 1 KQ2E08-00 19 38 52 17 KQ2E10-00 M20 1 70 21 42.5 41.5 58.3 113 29.5 46.1 (96) 24 27 32 KQ2E12-00 KQ2E16-00 44 51 90 115 23 29 M22 1 M28 1.5 Note) ( ): Values for soft nylon.

Micro Mechanical Valve Series VM1000

10 10 1 (P) 3 (R) 1 (P) 0.5 MPa supply Applicable tubing VM1100-4N-00 VM1000-4N-00 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port VM1100-4NU-00 VM1000-4NU-00 Applicable tube Mounting hole 2 x 3.3 T.T.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 1) The above dimensions are for ZQ1000U-J1 -F-00.

KG

(mm) Model Mounting hole Mounting plate thickness 11 mm or less M T (M) L 4 Nylon Urethane KGE06-00 KGE04-00 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 4 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 26.1 41.5 Applicable tubing 6 8 10 10.4 18.0 29.5 12 27 16 32 M28 x 1.5 51 25 113 (96) 115 KGE16-00 29 Note) Dimensions

CG5-S

(mm) Model KGF04-01 Rc 1/8 4 -02 Rc 1/4 4 6 8 10 12 KGD04-00 KGF06-01 Rc 1/8 KGD06-00 6 -02 Rc 1/4 KGD08-00 -03 Rc 3/8 KGD10-00 KGF08-01 Rc 1/8 KGD12-00 -02 8 Rc 1/4 -03 Rc 3/8 KGF10-02 Rc 1/4 10 -03 Rc 3/8 KGF12-02 Rc 1/4 12 -03 Rc 3/8 -04 Rc 1/2 23 One-touch Fittings/Stainless Steel Series Plug-in Elbow KGL Bulkhead Connector KGE Applicable tubing O.D.

CG5-S

(mm) Model KGF04-01 Rc 1/8 4 -02 Rc 1/4 4 6 8 10 12 KGD04-00 KGF06-01 Rc 1/8 KGD06-00 6 -02 Rc 1/4 KGD08-00 -03 Rc 3/8 KGD10-00 KGF08-01 Rc 1/8 KGD12-00 -02 8 Rc 1/4 -03 Rc 3/8 KGF10-02 Rc 1/4 10 -03 Rc 3/8 KGF12-02 Rc 1/4 12 -03 Rc 3/8 -04 Rc 1/2 23 One-touch Fittings/Stainless Steel Series Plug-in Elbow KGL Bulkhead Connector KGE Applicable tubing O.D.

Stainless Steel One-touch Fittings Series KG

Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 13 15 17 21 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

Series KG Stainless Steel One-touch Fittings

Nylon Urethane 4 KGE06-00 KGE04-00 26 33 52 70 KGE08-00 KGE10-00 5.6 13.1 18.0 29.5 5.6 13.1 26.1 41.5 14 32.5 16 17 34.5 17 19 38 18.5 24 42.5 21 13 15 17 21 M12 1 M14 1 M16 1 M20 1 M22 1 44 22 58.3 46.1 90 KGE12-00 23 6 8 10 12 27 16 32 M28 1.5 51 25 113 (96) 115 KGE16-00 29 Note) ( ): Values for soft nylon.

AC

gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140

Table of Contents

Set point VEX AMR 0.2 0.2 ITV IC 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 VBA Inlet pressure (MPa) Inlet pressure (MPa) VE AR30K AR60K VY1 0.25 0.25 G Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point PPA 0.2 0.2 AL 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) Inlet pressure

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

-00 KPQL10-00 18.5 16 25 35 23 6.8 28.4 M L 8 12 KPGL12-00 KPQL12-00 20.9 20 40 50 24 7.5 30.4 Note 1) D indicates the maximum diameter.

KJ

(inch) Note) Weight (g) D L M Model 1 8 KJH01-00 KJH03-00 KJH07-00 8.4 9.3 26.3 26.3 12.7 12.7 12 13.6 4.6 3 2.5 2.6 1.7 1.4 5 32 1 4 28.1 Note) D: Max. diameter 2-Applicable tubing 15-4-3 Series KJ Different Diameter Straight: KJH Applicable tubing O.D.

Series AP500

00-83000297 00-83000299 00-83000301 00-83000302 00-83000303 Connections Temperature range 1/4 inch face seal (Female) 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 1%F.S.

2

(MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) AR50(K)-B AR60(K)-B 0.25 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 281 Regulator Series AR10-A Regulator Series

Modular F.R.L. Unit

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa Inlet pressure MPa AW20 AW40 0.25 0.25 Outlet pressure MPa Outlet pressure MPa Set point Set point 0.2 0.2 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure MPa Inlet pressure MPa 57 Filter Regulator

Shock Absorbers and Rate Controls

O[fl4.OJilr2firr(S) 2.0 i.o t7.00 1.001 +.0I0/-.000 l . +.001 1.. +.001 00 / _0t0 1.505 +.021Y-flo 1.50t 420/.u!

VCC

1 1 1 1 2 1 1 2 1 1 1 2 1 2 2 1 1 1 1 1 3 2 3 VCC12-1A-1 (for VCC12-00) 1 set unit VCC12(D)-00 (dedicated) Orifice body assembly VCC12D-1A-1 (for VCC12D-00) VNA 1 set unit VNB O-ring assembly 1 set unit VCC12-OR-1 SGC O-ring assembly Orifice assembly 1 set unit VCC12-OR-4 SGH 1 set unit VCC13-1A-1 VNC VCC13-00 (dedicated) 1 set unit VNH O-ring assembly VCC13-OR-1 O-ring assembly 1 set unit