ZP

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

M-E05-1-LQ1

Metric size Inch size 3 4 6 8 10 12 19 25 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" LQ GP R 3 Type Body class Insert pin (single) Body class (Refer to Table 1) Tubing size symbol (Refer to Table 1) 1 Note) 03 04 Note) 03 LQ GHR 07 2 Note) 03 04 06 Note) 03 05 07 Holder (single) Tubing size symbol (Refer to Table 1) 3 06 08 10 07 11 R 4 10 12 11 13 Parts case (2) 5 12 Note) 19 13 Note) 19 Description

Table of Contents

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

KJ

Port size KKA3P-01M-1 -02M-1 -03M-1 KKA4P-02M-1 -03M-1 -04M-1 KKA6P-03M-1 -04M-1 -06M-1 KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Port size Body size Part no.

2

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the handle.

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Vacuum Pad

)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material.

Hydraulic Filters

2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 56 56 56 76 76 76 101 101 71 71 71

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Speed Controller with Indicator

Note 1) Metric size 23 3.2 Note 2) 04 4 06 6 08 8 10 10 12 12 16 16 Inch size Note 3) 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Indicator window direction Elbow Universal Nil 0 Indicator window Note 1) For selecting applicable tubing O.D., refer to the Model on page 4. Note 2) Use 1/8" tubing.

Micro Mechanical Valve Series VM1000

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole 2 x 3.3 Toggle lever VM1000-4N-08 VM1000-4NU-08 VM1100-4N-08 VM1100-4NU-08 Symbol/2 port 3 port Panel mounting hole (A) 2 (A) 2 12 12 10 10 Lock nut thick 2 Max. 5 1 (P) 1 (P) 3 (R) 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing VM1100-4N-08 VM1000-4N-08 T0425 TU0425, T0403, TS0425 Side ported 3 port 2 port

VM

Toggle Lever/VM1000-4N-08, VM1000-4NU-08 VM1100-4N-08, VM1100-4NU-08 JIS Symbol/2 port 3 port Panel mounted hole Applicable tube 0.5MPa supply T0425 TU0425, T0403, TS0425 Side piping 3 ports 2 ports VM1100-4NU-08 VM1000-4NU-08 VM1100-4N-08 VM1000-4N-08 4N F.O.F. 40 P.T.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Model: -, Port Size: -, Suffix: -, Stations: -

Model: -, Port Size: -, Suffix: -, Stations: -

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note