Table of Contents

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CRB2/CRBU2/CRB1

W1 = L3 = L1 = 10 10 4.5 to 14 0.5 to 2 Y-1 L2-1 6.5 to 14 X-3 L1-1 0.5 to 2 L4 = 15 15 Y = 5.5 to 18 Y-1.5 L2-1 0.5 to 2.5 X-4 L1-1 8 to 18 0.5 to 2.5 L2 = 20 20 Y-1.5 L2-1 6 to 20 0.5 to 3 9 to 20 X-4.5 L1-1 0.5 to 3 X = 30 30 0.5 to 4 Y-2 L2-2 8.5 to 22 0.5 to 4 X-5 L1-2 11.5 to 22 W2 = 40 40 0.5 to 5 Y-4.5 L2-2 13.5 to 30 0.5 to 5 15.5 to 30 X-5.5 L1-2 29 Series CRB2 Axial: Top (Long-shaft

SMC Pneumatic Clean Series

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

SMC

extension end KA 18.5 8.5 5 K 18.5 8.5 4.75 Vacuum suction port M5 x 0.8 5 NA-M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2-M5 x 0.8 4H9 depth 3.5 +0.030 0 2-M4 x 0.7 thread depth 5 HA GA 4H9 depth 3.5 +0.030 0 NN-M5 x 0.8 thread depth 10 B A 5 1 20 9 9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN1) x H G Section AA Section

SMC Pneumatic Clean Series

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

SMC Pneumatic Clean Series

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

Compact Electric Actuator Series LG1

I/F 12 Series LG1H High Rigidity Direct Acting Guide Type Nonstandard Motors/Mitsubishi Electric Corporation Drivers Dimensions (Without RS-232C option unit) 100 40 1-5 hole 5 5 5 5 120 130 5 5 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 7 8 9 10 Pin No. 11 12 13 14 15 16 17 19 20 Signal name Digital output power supply Failure Positioning completion Z phase pulse

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

5 5 120 130 5 5 Driver input/output signal list (CN-1/F connector) Driver dimensions For LJ1, LG1, LX Pin no.

Ozone Resistant

Evaluation: Cracking detection using a magnified 50x metallurgical microscope 2 2 Basic Structure and Ozone Resistance Ozone resistance of NBR and HNBR varies depending on its structure.

Table of Contents

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

LEC-OM07605CN

PB51]5(_ _ _ 1) 4500 [Hz] 10 4500 5 30 5. [] PB51 NHQ5 5 5 [Pr. PE41](_ _ _ 1) 5] _ _ _ x 5 0 1 0h _ _ x _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h _ x _ _ 0:=2 1:=3 2:=4 3:=5 0h x _ _ _ 0h PB52 VRF21 2 2 [Pr. PA24]3(_ _ _ 1) [Pr. PB02]2(_ _1 _) (_ _ 2 _) 100.0 0.1 [Hz] 300.0 PB53 VRF22 2 2 [Pr. PA24]3(_ _ _ 1) [Pr. PB02]2(_ _1 _) (_ _ 2 _) 100.0 0.1 [Hz] 300.0 PB54 VRF23 2 2 [Pr.

Rotary Actuator/Vane Type

2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

XL

Aluminum (setting temp.: 120C [248F]) Stainless steel (setting temp.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2

High Vacuum Angle Valve, XL Series

Aluminum (setting temp.: 120C [248F]) Stainless steel (setting temp.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2