SMC Pneumatic Clean Series

6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5 37.5 35.5 17.5 M32 x 2 23 10 8

SMC

Cn: ISO Class 3 ISO Class 2 ISO Class 1 1 N: Class no.(1 to 9), intermediate class (1.1 to 8.9) D: Measured particle diameter (m) 0.1:Constant number (m) 0.1 1 10 Particle diameter, D (m) Front matter 24 Series MXS 1322Air slide table 6, 8, 12, 16, 20, 25 How to Order Port type Bore size Symbol Type 6 to 16 M-thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide

SMC Pneumatic Clean Series

+ Stroke ZZ + Stroke (mm) 2 1 10 10 10 10 GB M4 x 0.7 depth 7 J M10 x 1.25 M10 x 1.25 M8 x 1.25 MM 1/8 1/8 1/8 1/8 P 27 19.5 19.5 15.5 AL Bore size Standard stroke range Up to 200 Up to 300 Up to 300 Up to 300 50 35 32 Up to 300 63 80 100 50 40 40 35 H A 8 6 6 5 H1 47 38 31 26 I 13<10> 20<18> 20 20 GA 19 17 17 13 B1 6 5.5 5.5 5 K 44 35.5 29 24 NA 9 7 7 7 RA 26 20 16.5

SMC Pneumatic Clean Series

Cn: ISO Class 3 ISO Class 2 ISO Class 1 1 N: Class no.(1 to 9), intermediate class (1.1 to 8.9) D: Measured particle diameter (m) 0.1:Constant number (m) 0.1 1 10 Particle diameter, D (m) Front matter 24 Mini-free mount cylinder 6, 8, 10 1011Series CUJ How to Order Double acting 6 8 F8N 10 D C D UJB Number of auto switches Clean series Nil 2 pcs.

Compact Electric Actuator Series LG1

(They can also be validated by parameters.) 6) A sequence should be implemented to turn ON the RDY relay after confirming that there is no trouble with the servo (ALM signal is ON). 13 Series LG1H Nonstandard Motors / Yaskawa Electric Corporation Drivers Dimensions 45 2-6 149 160 6 50 55 130 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 6 7 8 10 13 Pin No. 14 15 16

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.

LEC-OM07605CN

1) () 4) CN3 CN 3 CNP1 (1) (1) 6) 6) CN8 CN 8 CN1A CN1A CNP2 2) CN1B CN1B CNP3 CN2 CN2 () CN4 CN4 (10m IP65) 15)16)17)18) 11)12)13)14) DC24V LE-7)8)9)10) 1.

Table of Contents

to 6 stations Rc, NPT, G 1/8 IP66 (IP65 for solenoid valve.

Rotary Actuator/Vane Type

1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Body Size: 4, Pilot Type: Internal Pilot, Stations: 2 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: NPT

Body Size: 4, Pilot Type: Internal Pilot, Stations: 4 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: NPT

Body Size: 4, Pilot Type: Internal Pilot, Stations: 3 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: NPT

Body Size: 4, Pilot Type: 1 (Internal Pilot), Stations: 2 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: N (NPT)

Body Size: 4, Pilot Type: 1 (Internal Pilot), Stations: 4 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: N (NPT)

Body Size: 4, Pilot Type: 1 (Internal Pilot), Stations: 3 Stations, Port Size: C [1(P), 3(R): 1/2; 2(A): 3/8], Thread: N (NPT)

Ozone Resistant

Ozone Exposure Concentration and Its Physical Effects Standard Ozone Concentration in Working Environments in Various Countries Ozone Emitting Equipment and Devices 6. List of Ozone Resistant Products 1: Standard (HNBR) . 9 7. List of Ozone Resistant Non-HNBR Type Products 2: Series 80. 10 Reference Data: Photochemical Oxidants . 11 1.

2

(mm) 2 x Applicable tubing D Weight (g) Nylon Urethane 4 1/8 KQ2D04-01lS 10 8.2 15.8 23.3 24.3 13.3 5.7 6 3.2 6 6 3.6 9.2 1/4 KQ2D04-02lS 14 8.2 15.8 27.7 27.1 13.3 5.7 6 3.2 6 6 3.6 19 O N L1 M 6 1/8 KQ2D06-01lS 12 10.4 16.8 24.3 26.4 13.3 6.7 6 3.2 13.9 11 5.4 10.2 1/4 KQ2D06-02lS 14 10.4 16.8 28.7 29.2 13.3 6.7 6 3.2 13.9 11 5.4 19.1 3/8 KQ2D06-03lS 17 10.4 16.8 30.1 30.2 13.3 6.7 6 3.2

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage